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MASSACHUSETTS FINANCIAL SERVICES CO /MA/

Position in ENTG — Entegris Inc

CIK 912938 Boston, MA

Position in ENTG

as of Jun 30, 2026 · filed Aug 3, 2026
Position Value
$208,920,877
+$46,934,122 QoQ
Shares Held
1,161,575
-15.9% QoQ
Ownership
0.760%
of shares outstanding
% of Portfolio
0.07%
of 13F equity value
Holder Rank
#31
of 738 holders
Holding Since
Jun 2020
22 quarters on record
Voting authority Sole 83% Shared 16% None 1%

Common Shares in ENTG Over Time

Shares Held

Position Value (USD)

Position in Semiconductor Equipment & Materials

Technology · as of Jun 30, 2026

MASSACHUSETTS FINANCIAL SERVICES CO /MA/ holds $6,850,708,177 across 12 Semiconductor Equipment & Materials names. ENTG ranks #5 (3.0% of the industry book) .

# Ticker Company Shares Value (USD) Open
5 ENTG
Entegris Inc
This page
1,161,575 $208,920,877

All Filings in ENTG

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22 filing rows on record
Report Date Value (USD) Shares
2026-06-30 $208,920,877 1,161,575
2026-03-31 $161,986,755 1,381,668
2025-12-31 $119,879,492 1,422,902
2025-09-30 $137,260,568 1,484,540
2025-06-30 $98,316,704 1,219,054
2024-06-30 $52,248,284 385,881
2024-03-31 $53,992,655 384,180
2023-12-31 $37,806,202 315,525
2023-09-30 $29,447,075 313,567
2023-06-30 $178,479,376 1,610,534
2023-03-31 $137,934,338 1,681,921
2022-12-31 $109,605,216 1,671,066
2022-09-30 $227,897,619 2,745,093
2022-06-30 $252,676,841 2,742,612
2022-03-31 $350,934,633 2,673,584
2021-12-31 $361,866,607 2,611,247
2021-09-30 $325,021,927 2,581,588
2021-06-30 $320,564,097 2,606,848
2021-03-31 $295,537,597 2,643,449
2020-12-31 $230,513,531 2,398,684
2020-09-30 $106,601,552 1,433,973
2020-06-30 $50,860,176 861,307