PRIMECAP MANAGEMENT CO/CA/

Position in ACLS — Axcelis Technologies Inc

CIK 763212 PASADENA, CA

Position in ACLS

as of Mar 31, 2026 · filed May 11, 2026 Compact

Position Value

$61,307,328

+$7,885,888 QoQ

Shares Held

658,652

-0.9% QoQ

Ownership

2.14%

of shares outstanding

% of Portfolio

0.05%

of 13F equity value

Holder Rank

—

not a current holder

Holding Since

Mar 2020

25 quarters on record

Voting authority Sole 100% Shared 0% None 0%

Technology · as of Mar 31, 2026

PRIMECAP MANAGEMENT CO/CA/ holds $2,106,043,585 across 9 Semiconductor Equipment & Materials names. ACLS ranks #8 (2.9% of the industry book) .

#	Ticker	Company	Shares	Value (USD)
1	ASML	Asml Holding NV	353,076	$466,353,373
2	AMAT	Applied Materials Inc /De	1,174,126	$401,304,525
3	ENTG	Entegris Inc	3,142,833	$368,465,740
4	KLAC	Kla Corp	2,437,647	$358,921,581
5	FORM	Formfactor Inc	1,788,644	$173,480,581
6	TER	Teradyne, Inc	550,610	$163,233,840
7	Q	Qnity Electronics, Inc.	970,514	$111,977,905
8	ACLS	Axcelis Technologies Inc This page	658,652	$61,307,328

25 filing rows on record

Report Date	Value (USD)	Shares	Change	Type	Discretion	Filed
2026-03-31	$61,307,328	658,652	-0.9%	Shares	Sole	2026-05-11
2025-12-31	$53,421,440	664,942	-20.2%	Shares	Sole	2026-02-11
2025-09-30	$81,400,124	833,676	-2.2%	Shares	Sole	2025-11-12
2025-06-30	$59,396,508	852,296	+2.1%	Shares	Sole	2025-08-11
2025-03-31	$41,477,728	835,066	-8.9%	Shares	Sole	2025-05-09
2024-12-31	$64,030,684	916,426	-6.0%	Shares	Sole	2025-02-10
2024-09-30	$102,169,614	974,436	-1.6%	Shares	Sole	2024-11-08
2024-06-30	$140,739,093	989,796	-2.3%	Shares	Sole	2024-08-09
2024-03-31	$112,969,313	1,012,996	-2.8%	Shares	Sole	2024-05-14
2023-12-31	$135,142,945	1,042,046	-0.4%	Shares	Sole	2024-02-09
2023-09-30	$170,546,386	1,045,976	-2.9%	Shares	Sole	2023-11-13
2023-06-30	$197,473,176	1,077,146	-7.6%	Shares	Sole	2023-08-11
2023-03-31	$155,266,364	1,165,226	-8.6%	Shares	Sole	2023-05-15
2022-12-31	$101,208,284	1,275,306	-22.7%	Shares	Sole	2023-02-13
2022-09-30	$99,891,660	1,649,466	-1.9%	Shares	Sole	2022-11-14
2022-06-30	$92,164,707	1,680,611	-13.1%	Shares	Sole	2022-08-11
2022-03-31	$146,135,444	1,934,800	-7.6%	Shares	Sole	2022-05-11
2021-12-31	$156,193,507	2,094,870	-6.0%	Shares	Sole	2022-02-11
2021-09-30	$104,792,246	2,228,200	-2.9%	Shares	Sole	2021-11-12
2021-06-30	$92,748,944	2,294,630	-1.7%	Shares	Sole	2021-08-10
2021-03-31	$95,936,932	2,334,800	-6.5%	Shares	Sole	2021-05-14
2020-12-31	$72,744,963	2,498,110	-3.4%	Shares	Sole	2021-02-08
2020-09-30	$56,900,800	2,586,400	-4.7%	Shares	Sole	2020-11-13
2020-06-30	$75,601,610	2,714,600	-2.2%	Shares	Sole	2020-08-13
2020-03-31	$50,835,884	2,776,400	—	Shares	Sole	2020-05-14
No filing history on record for this holder in this stock.