Position in AEHR
as of Mar 31, 2026
· filed May 12, 2026
Position Value
$1,412,822
+$562,783 QoQ
Shares Held
38,102
-9.5% QoQ
Ownership
0.121%
of shares outstanding
% of Portfolio
0.01%
of 13F equity value
Holder Rank
—
not a current holder
Holding Since
Mar 2020
25 quarters on record
Voting authority
Sole 100.ToString("F0")%
Shared 0.ToString("F0")%
None 0.ToString("F0")%
Common Shares in AEHR Over Time
Shares Held
Position Value (USD)
Position in Semiconductor Equipment & Materials
Technology · as of Mar 31, 2026ROYCE & ASSOCIATES LP holds $447,927,573 across 15 Semiconductor Equipment & Materials names. AEHR ranks #15 (0.3% of the industry book) .
| # | Ticker | Company | Shares | Value (USD) | Open |
|---|---|---|---|---|---|
| 1 | ONTO |
Onto Innovation Inc.
|
317,109 | $65,029,542 | |
| 2 | COHU |
Cohu Inc
|
2,027,717 | $62,088,694 | |
| 3 | UCTT |
Ultra Clean Holdings, Inc.
|
759,497 | $47,225,523 | |
| 4 | FORM |
Formfactor Inc
|
451,863 | $43,826,192 | |
| 5 | ICHR |
Ichor Holdings, Ltd.
|
849,336 | $39,587,550 | |
| 6 | KLIC |
Kulicke & Soffa Industries Inc
|
587,147 | $38,587,300 | |
| 7 | CAMT |
Camtek Ltd
|
202,488 | $30,699,205 | |
| 8 | NVMI |
Nova Ltd.
|
65,830 | $28,588,652 |
All Filings in AEHR
Export CSV
25 filing rows on record
| Report Date | Value (USD) | Shares | Type | Discretion | Filed | |
|---|---|---|---|---|---|---|
| 2026-03-31 | $1,412,822 | 38,102 | Shares | Sole | 2026-05-12 | |
| 2025-12-31 | $850,039 | 42,102 | Shares | Sole | 2026-02-09 | |
| 2025-09-30 | $1,668,846 | 55,425 | Shares | Sole | 2025-11-12 | |
| 2025-06-30 | $1,442,315 | 111,548 | Shares | Sole | 2025-08-11 | |
| 2025-03-31 | $1,252,166 | 171,765 | Shares | Sole | 2025-05-06 | |
| 2024-12-31 | $2,856,451 | 171,765 | Shares | Sole | 2025-02-10 | |
| 2024-09-30 | $2,207,180 | 171,765 | Shares | Sole | 2024-11-06 | |
| 2024-06-30 | $1,918,615 | 171,765 | Shares | Sole | 2024-08-13 | |
| 2024-03-31 | $2,005,886 | 161,765 | Shares | Sole | 2024-05-13 | |
| 2023-12-31 | $2,792,680 | 105,265 | Shares | Sole | 2024-02-12 | |
| 2023-09-30 | $8,791,080 | 192,365 | Shares | Sole | 2023-11-09 | |
| 2023-06-30 | $11,342,058 | 274,959 | Shares | Sole | 2023-08-07 | |
| 2023-03-31 | $7,452,834 | 240,259 | Shares | Sole | 2023-05-23 | |
| 2022-12-31 | $7,524,615 | 374,359 | Shares | Sole | 2023-05-23 | |
| 2022-09-30 | $3,236,781 | 229,559 | Shares | Sole | 2022-11-03 | |
| 2022-06-30 | $2,096,692 | 279,559 | Shares | Sole | 2022-08-04 | |
| 2022-03-31 | $3,154,263 | 310,459 | Shares | Sole | 2022-05-05 | |
| 2021-12-31 | $6,326,914 | 261,659 | Shares | Sole | 2022-02-07 | |
| 2021-09-30 | $6,876,310 | 503,759 | Shares | Sole | 2021-11-10 | |
| 2021-06-30 | $2,892,204 | 1,047,900 | Shares | Sole | 2021-08-06 | |
| 2021-03-31 | $2,640,708 | 1,047,900 | Shares | Sole | 2021-05-10 | |
| 2020-12-31 | $2,651,187 | 1,047,900 | Shares | Sole | 2021-02-08 | |
| 2020-09-30 | $1,798,521 | 1,293,900 | Shares | Sole | 2020-11-12 | |
| 2020-06-30 | $2,536,044 | 1,293,900 | Shares | Sole | 2020-08-07 | |
| 2020-03-31 | $2,160,813 | 1,293,900 | Shares | Sole | 2020-05-12 | |
| No filing history on record for this holder in this stock. | ||||||