ROYCE & ASSOCIATES LP

Position in ONTO — Onto Innovation Inc.

CIK 906304 New York, NY

Back to ONTO Full portfolio

Position in ONTO

as of Jun 30, 2026 · filed Aug 14, 2026 Compact

Position Value

$108,269,625

+$43,240,083 QoQ

Shares Held

286,087

-9.8% QoQ

Ownership

0.583%

of shares outstanding

% of Portfolio

0.89%

of 13F equity value

Holder Rank

#41

of 686 holders

Holding Since

Mar 2020

26 quarters on record

Voting authority Sole 100% Shared 0% None 0%

Common Shares in ONTO Over Time

Shares Held

Position Value (USD)

Position in Semiconductor Equipment & Materials

Technology · as of Jun 30, 2026

ROYCE & ASSOCIATES LP holds $585,907,278 across 15 Semiconductor Equipment & Materials names. ONTO ranks #1 (18.5% of the industry book) .

#	Ticker	Company	Shares	Value (USD)
1	ONTO	Onto Innovation Inc. This page	286,087	$108,269,625
2	UCTT	Ultra Clean Holdings, Inc.	666,496	$95,035,664
3	COHU	Cohu Inc	938,030	$69,329,797
4	ICHR	Ichor Holdings, Ltd.	608,109	$68,278,478
5	KLIC	Kulicke & Soffa Industries Inc	306,723	$41,027,268
6	FORM	Formfactor Inc	234,556	$37,512,541
7	CAMT	Camtek Ltd	210,711	$34,371,178
8	NVMI	Nova Ltd.	54,029	$29,334,505

All Filings in ONTO

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26 filing rows on record

Report Date	Value (USD)	Shares	Change	Type	Discretion	Filed
2026-06-30	$108,269,625	286,087	-9.8%	Shares	Sole	2026-08-14
2026-03-31	$65,029,542	317,109	-13.3%	Shares	Sole	2026-05-12
2025-12-31	$57,734,927	365,735	+18.9%	Shares	Sole	2026-02-09
2025-09-30	$39,732,048	307,476	+17.7%	Shares	Sole	2025-11-12
2025-06-30	$26,372,807	261,298	+19.0%	Shares	Sole	2025-08-11
2025-03-31	$26,647,234	219,608	-0.0%	Shares	Sole	2025-05-06
2024-12-31	$36,608,732	219,648	-1.6%	Shares	Sole	2025-02-10
2024-09-30	$46,318,674	223,158	-8.0%	Shares	Sole	2024-11-06
2024-06-30	$53,272,281	242,632	-3.2%	Shares	Sole	2024-08-13
2024-03-31	$45,389,693	250,661	-30.9%	Shares	Sole	2024-05-13
2023-12-31	$55,490,009	362,917	-19.2%	Shares	Sole	2024-02-12
2023-09-30	$57,304,300	449,375	+4.2%	Shares	Sole	2023-11-09
2023-06-30	$50,207,887	431,080	-20.0%	Shares	Sole	2023-08-07
2023-03-31	$47,376,986	539,110	+0.0%	Shares	Sole	2023-05-23
2022-12-31	$36,706,638	539,090	-14.7%	Shares	Sole	2023-05-23
2022-09-30	$40,473,002	631,897	-0.8%	Shares	Sole	2022-11-03
2022-06-30	$44,407,433	636,757	+20.4%	Shares	Sole	2022-08-04
2022-03-31	$45,972,369	529,087	+16.1%	Shares	Sole	2022-05-05
2021-12-31	$46,114,820	455,545	-27.3%	Shares	Sole	2022-02-07
2021-09-30	$45,263,830	626,489	-4.9%	Shares	Sole	2021-11-10
2021-06-30	$48,131,314	658,972	-16.7%	Shares	Sole	2021-08-06
2021-03-31	$51,989,226	791,192	-11.6%	Shares	Sole	2021-05-10
2020-12-31	$42,571,515	895,300	+16.5%	Shares	Sole	2021-02-08
2020-09-30	$22,890,039	768,638	+1.3%	Shares	Sole	2020-11-12
2020-06-30	$25,818,489	758,475	-11.4%	Shares	Sole	2020-08-07
2020-03-31	$25,401,139	856,122	—	Shares	Sole	2020-05-12
No filing history on record for this holder in this stock.