DIMENSIONAL FUND ADVISORS LP

Position in ACLS — Axcelis Technologies Inc

CIK 354204 AUSTIN, TX

Position in ACLS

as of Mar 31, 2026 · filed May 7, 2026 Compact

Position Value

$78,568,547

+$10,999,395 QoQ

Shares Held

844,097

+0.4% QoQ

Ownership

2.75%

of shares outstanding

% of Portfolio

0.02%

of 13F equity value

Holder Rank

—

not a current holder

Holding Since

Mar 2020

25 quarters on record

Voting authority Sole 90% Shared 6% None 4%

Technology · as of Mar 31, 2026

DIMENSIONAL FUND ADVISORS LP holds $6,878,520,864 across 27 Semiconductor Equipment & Materials names. ACLS ranks #15 (1.1% of the industry book) .

#	Ticker	Company	Shares	Value (USD)
1	ASML	Asml Holding NV	1,033,583	$1,365,187,431
2	LRCX	Lam Research Corp	6,312,616	$1,348,753,531
3	KLAC	Kla Corp	716,138	$1,054,448,750
4	AMAT	Applied Materials Inc /De	2,852,647	$975,006,216
5	AMKR	Amkor Technology, Inc.	10,991,469	$494,945,847
6	TER	Teradyne, Inc	720,661	$213,647,157
7	IPGP	Ipg Photonics Corp	1,701,269	$194,948,411
8	Q	Qnity Electronics, Inc.	1,661,636	$191,719,558

25 filing rows on record

Report Date	Value (USD)	Shares	Change	Type	Discretion	Filed
2026-03-31	$78,568,547	844,097	+0.4%	Shares	Sole	2026-05-07
2025-12-31	$67,569,152	841,040	+9.3%	Shares	Sole	2026-02-12
2025-09-30	$75,144,913	769,612	+4.6%	Shares	Sole	2025-11-12
2025-06-30	$51,254,136	735,459	+4.9%	Shares	Sole	2025-08-12
2025-03-31	$34,832,327	701,275	-3.2%	Shares	Sole	2025-05-13
2024-12-31	$50,626,752	724,585	+11.0%	Shares	Sole	2025-02-13
2024-09-30	$68,462,225	652,954	-0.8%	Shares	Sole	2024-11-07
2024-06-30	$93,576,942	658,112	-2.7%	Shares	Sole	2024-08-09
2024-03-31	$75,459,448	676,645	-2.1%	Shares	Sole	2024-05-10
2023-12-31	$89,656,900	691,317	-26.5%	Shares	Sole	2024-02-07
2023-09-30	$153,370,209	940,633	-0.0%	Shares	Sole	2023-11-09
2023-06-30	$172,528,010	941,079	-8.4%	Shares	Sole	2023-08-09
2023-03-31	$136,928,631	1,027,607	-25.8%	Shares	Sole	2023-05-12
2022-12-31	$109,960,578	1,385,592	-1.3%	Shares	Sole	2023-02-09
2022-09-30	$85,011,885	1,403,763	-5.6%	Shares	Sole	2022-11-10
2022-06-30	$81,542,581	1,486,918	-4.5%	Shares	Sole	2022-08-12
2022-03-31	$117,626,343	1,557,346	-1.2%	Shares	Defined	2022-05-13
2021-12-31	$117,469,578	1,575,504	-2.1%	Shares	Defined	2022-02-09
2021-09-30	$75,676,396	1,609,109	+0.4%	Shares	Defined	2021-11-12
2021-06-30	$64,790,551	1,602,933	-2.3%	Shares	Defined	2021-08-12
2021-03-31	$67,396,557	1,640,218	-4.6%	Shares	Defined	2021-05-14
2020-12-31	$50,067,821	1,719,362	-3.7%	Shares	Defined	2021-03-08
2020-09-30	$39,267,536	1,784,888	-8.1%	Shares	Defined	2020-11-12
2020-06-30	$54,093,918	1,942,331	-8.6%	Shares	Defined	2020-08-13
2020-03-31	$38,903,037	2,124,688	—	Shares	Defined	2020-05-14
No filing history on record for this holder in this stock.