EMERALD ADVISERS, LLC

Position in ACLS — Axcelis Technologies Inc

CIK 1015083 LEOLA, PA

Position in ACLS

as of Mar 31, 2026 · filed May 4, 2026 Compact

Position Value

$8,957,833

New position

Shares Held

96,238

first reported quarter

Ownership

0.313%

of shares outstanding

% of Portfolio

0.28%

of 13F equity value

Holder Rank

—

not a current holder

Holding Since

Mar 2026

1 quarter on record

Voting authority Sole 76% Shared 0% None 24%

Technology · as of Mar 31, 2026

EMERALD ADVISERS, LLC holds $129,464,209 across 5 Semiconductor Equipment & Materials names. ACLS ranks #5 (6.9% of the industry book) .

#	Ticker	Company	Shares	Value (USD)
1	KLIC	Kulicke & Soffa Industries Inc	568,996	$37,394,417
2	IPGP	Ipg Photonics Corp	304,916	$34,940,324
3	ONTO	Onto Innovation Inc.	118,423	$24,285,004
4	COHU	Cohu Inc	780,099	$23,886,631
5	ACLS	Axcelis Technologies Inc This page	96,238	$8,957,833

1 filing row on record

Report Date	Value (USD)	Shares	Change	Type	Discretion	Filed
2026-03-31	$8,957,833	96,238	—	Shares	Sole	2026-05-04
No filing history on record for this holder in this stock.