HARBOR CAPITAL ADVISORS, INC.

Position in ACLS — Axcelis Technologies Inc

CIK 1039128 CHICAGO, IL

Position in ACLS

as of Jun 30, 2026 · filed Aug 7, 2026 Compact

Position Value

$4,918,311

+$1,024,682 QoQ

Shares Held

25,961

-37.9% QoQ

Ownership

0.084%

of shares outstanding

% of Portfolio

0.38%

of 13F equity value

Holder Rank

#88

of 441 holders

Holding Since

Mar 2024

10 quarters on record

Voting authority Sole 100% Shared 0% None 0%

Technology · as of Jun 30, 2026

HARBOR CAPITAL ADVISORS, INC. holds $36,177,285 across 9 Semiconductor Equipment & Materials names. ACLS ranks #3 (13.6% of the industry book) .

#	Ticker	Company	Shares	Value (USD)
1	KLAC	Kla Corp	44,033	$13,285,196
2	LRCX	Lam Research Corp	21,406	$9,275,861
3	ACLS	Axcelis Technologies Inc This page	25,961	$4,918,311
4	FORM	Formfactor Inc	18,088	$2,892,813
5	TER	Teradyne, Inc	4,170	$2,017,612
6	AMBA	Ambarella Inc	23,331	$2,001,799
7	KLIC	Kulicke & Soffa Industries Inc	13,115	$1,754,262
8	UCTT	Ultra Clean Holdings, Inc.	129	$18,394

10 filing rows on record

Report Date	Value (USD)	Shares	Change	Type	Discretion	Filed
2026-06-30	$4,918,311	25,961	-37.9%	Shares	Sole	2026-08-07
2026-03-31	$3,893,629	41,831	-6.4%	Shares	Sole	2026-04-28
2025-12-31	$3,590,153	44,687	-0.8%	Shares	Sole	2026-01-20
2025-09-30	$4,396,241	45,025	-66.8%	Shares	Sole	2025-10-15
2025-06-30	$9,448,779	135,583	-3.6%	Shares	Sole	2025-07-09
2025-03-31	$6,982,707	140,582	+60.1%	Shares	Sole	2025-04-14
2024-12-31	$6,136,332	87,825	+45.6%	Shares	Sole	2025-01-10
2024-09-30	$6,325,390	60,328	+243.8%	Shares	Sole	2024-10-29
2024-06-30	$2,495,292	17,549	+309.0%	Shares	Sole	2024-07-09
2024-03-31	$478,532	4,291	—	Shares	Sole	2024-05-13
No filing history on record for this holder in this stock.