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HARBOR CAPITAL ADVISORS, INC.

Position in ACLS — Axcelis Technologies Inc

CIK 1039128 CHICAGO, IL

Position in ACLS

as of Mar 31, 2026 · filed Apr 28, 2026
Position Value
$3,893,629
+$303,476 QoQ
Shares Held
41,831
-6.4% QoQ
Ownership
0.136%
of shares outstanding
% of Portfolio
0.36%
of 13F equity value
Holder Rank
not a current holder
Holding Since
Mar 2024
9 quarters on record
Voting authority Sole 100% Shared 0% None 0%

Common Shares in ACLS Over Time

Shares Held

Position Value (USD)

Position in Semiconductor Equipment & Materials

Technology · as of Mar 31, 2026

HARBOR CAPITAL ADVISORS, INC. holds $15,703,097 across 9 Semiconductor Equipment & Materials names. ACLS ranks #2 (24.8% of the industry book) .

# Ticker Company Shares Value (USD) Open
2 ACLS
Axcelis Technologies Inc
This page
41,831 $3,893,629

All Filings in ACLS

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9 filing rows on record
Report Date Value (USD) Shares
2026-03-31 $3,893,629 41,831
2025-12-31 $3,590,153 44,687
2025-09-30 $4,396,241 45,025
2025-06-30 $9,448,779 135,583
2025-03-31 $6,982,707 140,582
2024-12-31 $6,136,332 87,825
2024-09-30 $6,325,390 60,328
2024-06-30 $2,495,292 17,549
2024-03-31 $478,532 4,291