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Equibles

VANGUARD PORTFOLIO MANAGEMENT LLC

Position in ACLS — Axcelis Technologies Inc

CIK 2100121 MALVERN, PA
Back to ACLS Full portfolio

Position in ACLS

as of Jun 30, 2026 · filed Aug 13, 2026
Position Value
$469,623,437
+$238,013,125 QoQ
Shares Held
2,478,878
-0.4% QoQ
Ownership
8.03%
of shares outstanding
% of Portfolio
0.02%
of 13F equity value
Holder Rank
#3
of 441 holders
Holding Since
Mar 2026
2 quarters on record
Voting authority Sole 0% Shared 0% None 100%

Common Shares in ACLS Over Time

Shares Held

Position Value (USD)

Position in Semiconductor Equipment & Materials

Technology · as of Jun 30, 2026

VANGUARD PORTFOLIO MANAGEMENT LLC holds $54,366,686,702 across 25 Semiconductor Equipment & Materials names. ACLS ranks #10 (0.9% of the industry book) .

# Ticker Company Shares Value (USD) Open
1 LRCX
Lam Research Corp
 36,635,534 $15,875,275,948
2 AMAT
Applied Materials Inc /De
 18,553,307 $13,414,040,961
3 KLAC
Kla Corp
 39,388,674 $11,883,956,832
4 TER
Teradyne, Inc
 8,633,782 $4,177,369,082
5 Q
Qnity Electronics, Inc.
 10,213,503 $1,667,967,174
6 ENTG
Entegris Inc
 7,784,532 $1,400,125,925
7 ONTO
Onto Innovation Inc.
 2,727,910 $1,032,377,539
8 FORM
Formfactor Inc
 5,242,203 $838,385,525

All Filings in ACLS

Export CSV
2 filing rows on record
Report Date Value (USD) Shares
2026-06-30 $469,623,437 2,478,878
2026-03-31 $231,610,312 2,488,293