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Equibles

WELLINGTON MANAGEMENT GROUP LLP

Position in ACLS — Axcelis Technologies Inc

CIK 902219 Boston, MA
Back to ACLS Full portfolio

Position in ACLS

as of Jun 30, 2026 · filed Aug 14, 2026
Position Value
$13,069,586
-$8,268,751 QoQ
Shares Held
68,987
-66.1% QoQ
Ownership
0.223%
of shares outstanding
% of Portfolio
0.00%
of 13F equity value
Holder Rank
#52
of 441 holders
Holding Since
Mar 2020
20 quarters on record
Voting authority Sole 0% Shared 59% None 41%

Common Shares in ACLS Over Time

Shares Held

Position Value (USD)

Position in Semiconductor Equipment & Materials

Technology · as of Jun 30, 2026

WELLINGTON MANAGEMENT GROUP LLP holds $8,269,010,880 across 18 Semiconductor Equipment & Materials names. ACLS ranks #16 (0.2% of the industry book) .

# Ticker Company Shares Value (USD) Open
1 KLAC
Kla Corp
 14,821,622 $4,471,831,568
2 ASML
Asml Holding NV
 928,538 $1,847,270,542
3 AMAT
Applied Materials Inc /De
 1,061,899 $767,752,977
4 LRCX
Lam Research Corp
 1,215,581 $526,747,713
5 ONTO
Onto Innovation Inc.
 539,314 $204,103,381
6 ICHR
Ichor Holdings, Ltd.
 1,108,844 $124,501,001
7 VECO
Veeco Instruments Inc
 761,575 $57,727,383
8 ENTG
Entegris Inc
 309,848 $55,729,259

All Filings in ACLS

Export CSV
20 filing rows on record
Report Date Value (USD) Shares
2026-06-30 $13,069,586 68,987
2024-09-30 $21,338,337 203,513
2024-06-30 $36,528,468 256,899
2024-03-31 $7,160,141 64,205
2023-12-31 $28,818,932 222,214
2023-09-30 $89,198,947 547,065
2023-06-30 $115,511,648 630,075
2023-03-31 $120,923,042 907,490
2022-12-31 $87,399,881 1,101,309
2022-09-30 $62,339,191 1,029,379
2022-06-30 $51,319,763 935,809
2022-03-31 $84,937,637 1,124,555
2021-12-31 $91,739,592 1,230,413
2021-09-30 $57,294,861 1,218,262
2021-06-30 $50,502,242 1,249,437
2021-03-31 $60,328,254 1,468,198
2020-12-31 $46,864,678 1,609,364
2020-09-30 $37,119,214 1,687,237
2020-06-30 $54,772,564 1,966,699
2020-03-31 $43,720,450 2,387,791