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Equibles

ARROWSTREET CAPITAL, LIMITED PARTNERSHIP

Position in ASYS — Amtech Systems Inc

CIK 1164508 BOSTON, MA
Back to ASYS Full portfolio

Position in ASYS

as of Jun 30, 2026 · filed Aug 13, 2026
Position Value
$7,129,319
+$2,861,599 QoQ
Shares Held
308,896
-15.5% QoQ
Ownership
1.76%
of shares outstanding
% of Portfolio
0.00%
of 13F equity value
Holder Rank
#9
of 111 holders
Holding Since
Mar 2020
12 quarters on record
Voting authority Sole 100% Shared 0% None 0%

Common Shares in ASYS Over Time

Shares Held

Position Value (USD)

Position in Semiconductor Equipment & Materials

Technology · as of Jun 30, 2026

ARROWSTREET CAPITAL, LIMITED PARTNERSHIP holds $10,178,355,564 across 16 Semiconductor Equipment & Materials names. ASYS ranks #11 (0.1% of the industry book) .

# Ticker Company Shares Value (USD) Open
1 LRCX
Lam Research Corp
 12,269,198 $5,316,611,569
2 ASML
Asml Holding NV
 1,463,906 $2,912,353,006
3 KLAC
Kla Corp
 4,712,396 $1,421,776,997
4 NVMI
Nova Ltd.
 423,058 $229,695,110
5 Q
Qnity Electronics, Inc.
 906,422 $148,027,776
6 FORM
Formfactor Inc
 376,376 $60,193,813
7 TER
Teradyne, Inc
 48,692 $23,559,137
8 VECO
Veeco Instruments Inc
 236,657 $17,938,600

All Filings in ASYS

Export CSV
12 filing rows on record
Report Date Value (USD) Shares
2026-06-30 $7,129,319 308,896
2026-03-31 $4,267,720 365,387
2025-12-31 $4,355,264 347,033
2025-09-30 $1,689,292 182,429
2021-12-31 $1,341,842 135,814
2021-09-30 $1,584,323 138,611
2021-06-30 $1,336,210 138,611
2021-03-31 $1,307,563 110,623
2020-12-31 $401,940 63,000
2020-09-30 $308,070 63,000
2020-06-30 $198,209 40,700
2020-03-31 $177,045 40,700