ARROWSTREET CAPITAL, LIMITED PARTNERSHIP

Position in ASYS — Amtech Systems Inc

CIK 1164508 BOSTON, MA

Back to ASYS Full portfolio

Position in ASYS

as of Mar 31, 2026 · filed May 14, 2026 Compact

Position Value

$4,267,720

-$87,544 QoQ

Shares Held

365,387

+5.3% QoQ

Ownership

2.52%

of shares outstanding

% of Portfolio

0.00%

of 13F equity value

Holder Rank

—

not a current holder

Holding Since

Mar 2020

11 quarters on record

Voting authority Sole 100% Shared 0% None 0%

Common Shares in ASYS Over Time

Shares Held

Position Value (USD)

Position in Semiconductor Equipment & Materials

Technology · as of Mar 31, 2026

ARROWSTREET CAPITAL, LIMITED PARTNERSHIP holds $6,486,234,656 across 16 Semiconductor Equipment & Materials names. ASYS ranks #13 (0.1% of the industry book) .

#	Ticker	Company	Shares	Value (USD)
1	LRCX	Lam Research Corp	13,179,818	$2,815,999,913
2	ASML	Asml Holding NV	1,641,565	$2,168,228,298
3	KLAC	Kla Corp	791,279	$1,165,087,112
4	NVMI	Nova Ltd.	190,399	$82,686,477
5	Q	Qnity Electronics, Inc.	574,487	$66,284,310
6	TER	Teradyne, Inc	191,980	$56,914,390
7	FORM	Formfactor Inc	508,642	$49,333,187
8	AMAT	Applied Materials Inc /De	108,603	$37,119,419

All Filings in ASYS

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11 filing rows on record

Report Date	Value (USD)	Shares	Change	Type	Discretion	Filed
2026-03-31	$4,267,720	365,387	+5.3%	Shares	Defined	2026-05-14
2025-12-31	$4,355,264	347,033	+90.2%	Shares	Defined	2026-02-13
2025-09-30	$1,689,292	182,429	+34.3%	Shares	Defined	2025-11-13
2021-12-31	$1,341,842	135,814	-2.0%	Shares	Defined	2022-02-14
2021-09-30	$1,584,323	138,611	0.0%	Shares	Defined	2021-11-12
2021-06-30	$1,336,210	138,611	+25.3%	Shares	Defined	2021-08-13
2021-03-31	$1,307,563	110,623	+75.6%	Shares	Defined	2021-05-14
2020-12-31	$401,940	63,000	0.0%	Shares	Defined	2021-02-12
2020-09-30	$308,070	63,000	+54.8%	Shares	Defined	2020-11-12
2020-06-30	$198,209	40,700	0.0%	Shares	Defined	2020-08-12
2020-03-31	$177,045	40,700	—	Shares	Defined	2020-05-15
No filing history on record for this holder in this stock.