PALISADE CAPITAL MANAGEMENT, LP

Position in ONTO — Onto Innovation Inc.

CIK 1009006 FORT LEE, NJ

Position in ONTO

as of Jun 30, 2026 · filed Aug 14, 2026 Compact

Position Value

$19,873,923

-$12,495,146 QoQ

Shares Held

52,514

-66.7% QoQ

Ownership

0.107%

of shares outstanding

% of Portfolio

1.03%

of 13F equity value

Holder Rank

#130

of 686 holders

Holding Since

Mar 2020

26 quarters on record

Voting authority Sole 88% Shared 0% None 12%

Technology · as of Jun 30, 2026

PALISADE CAPITAL MANAGEMENT, LP holds $33,649,293 across 4 Semiconductor Equipment & Materials names. ONTO ranks #1 (59.1% of the industry book) .

#	Ticker	Company	Shares	Value (USD)
1	ONTO	Onto Innovation Inc. This page	52,514	$19,873,923
2	AMAT	Applied Materials Inc /De	15,301	$11,062,623
3	KLAC	Kla Corp	7,745	$2,336,743
4	ASML	Asml Holding NV	189	$376,004

26 filing rows on record

Report Date	Value (USD)	Shares	Change	Type	Discretion	Filed
2026-06-30	$19,873,923	52,514	-66.7%	Shares	Sole	2026-08-14
2026-03-31	$32,369,069	157,844	-2.3%	Shares	Sole	2026-05-15
2025-12-31	$25,494,863	161,503	+37.4%	Shares	Sole	2026-02-17
2025-09-30	$15,185,546	117,517	-1.2%	Shares	Sole	2025-11-14
2025-06-30	$12,006,531	118,959	-2.8%	Shares	Sole	2025-08-14
2025-03-31	$14,854,685	122,422	-0.8%	Shares	Sole	2025-04-29
2024-12-31	$20,566,744	123,398	-22.4%	Shares	Sole	2025-02-14
2024-09-30	$33,022,380	159,098	-21.5%	Shares	Sole	2024-11-14
2024-06-30	$44,492,516	202,644	-23.4%	Shares	Sole	2024-08-14
2024-03-31	$47,899,824	264,523	-1.2%	Shares	Sole	2024-05-15
2023-12-31	$40,948,149	267,810	-20.2%	Shares	Sole	2024-02-14
2023-09-30	$42,797,624	335,615	+1.5%	Shares	Sole	2023-11-14
2023-06-30	$38,502,536	330,579	+5.0%	Shares	Sole	2023-08-14
2023-03-31	$27,658,120	314,726	-12.9%	Shares	Sole	2023-05-08
2022-12-31	$24,616,986	361,536	-1.6%	Shares	Sole	2023-03-24
2022-09-30	$23,528,959	367,353	-17.8%	Shares	Sole	2022-11-14
2022-06-30	$31,165,132	446,876	+1.1%	Shares	Sole	2022-08-10
2022-03-31	$38,395,040	441,881	-5.6%	Shares	Sole	2022-05-09
2021-12-31	$47,409,653	468,336	-12.7%	Shares	Sole	2022-04-21
2021-09-30	$38,750,059	536,333	+8.9%	Shares	Sole	2021-11-15
2021-06-30	$35,956,569	492,286	-0.9%	Shares	Sole	2021-08-12
2021-03-31	$32,653,730	496,937	+3.8%	Shares	Sole	2021-05-12
2020-12-31	$22,759,522	478,644	-3.7%	Shares	Sole	2021-02-11
2020-09-30	$14,800,600	496,998	+5.5%	Shares	Sole	2020-11-12
2020-06-30	$16,036,278	471,101	+0.5%	Shares	Sole	2020-08-06
2020-03-31	$13,911,461	468,873	—	Shares	Sole	2020-05-13
No filing history on record for this holder in this stock.