Skip to main content
Equibles

Granahan Investment Management, LLC

Position in ONTO — Onto Innovation Inc.

CIK 1026710 WALTHAM, MA
Back to ONTO Full portfolio

Position in ONTO

as of Jun 30, 2026 · filed Aug 14, 2026
Position Value
$53,576,409
+$12,830,231 QoQ
Shares Held
141,568
-28.8% QoQ
Ownership
0.288%
of shares outstanding
% of Portfolio
1.91%
of 13F equity value
Holder Rank
#75
of 690 holders
Holding Since
Mar 2020
26 quarters on record
Voting authority Sole 76% Shared 0% None 24%

Common Shares in ONTO Over Time

Shares Held

Position Value (USD)

Position in Semiconductor Equipment & Materials

Technology · as of Jun 30, 2026

Granahan Investment Management, LLC holds $74,040,006 across 3 Semiconductor Equipment & Materials names. ONTO ranks #1 (72.4% of the industry book) .

# Ticker Company Shares Value (USD) Open
1 ONTO
Onto Innovation Inc.
This page 		141,568 $53,576,409
2 VECO
Veeco Instruments Inc
 204,837 $15,526,644
3 NVMI
Nova Ltd.
 9,093 $4,936,953

All Filings in ONTO

Export CSV
26 filing rows on record
Report Date Value (USD) Shares
2026-06-30 $53,576,409 141,568
2026-03-31 $40,746,178 198,694
2025-12-31 $31,041,906 196,642
2025-09-30 $9,578,044 74,122
2025-06-30 $3,407,194 33,758
2025-03-31 $6,928,635 57,101
2024-12-31 $4,450,755 26,704
2024-09-30 $5,073,389 24,443
2024-06-30 $5,906,603 26,902
2024-03-31 $8,182,280 45,186
2023-12-31 $8,899,085 58,202
2023-09-30 $9,483,407 74,368
2023-06-30 $10,773,125 92,497
2023-03-31 $9,384,529 106,788
2022-12-31 $7,495,891 110,088
2022-09-30 $5,937,883 92,707
2022-06-30 $5,896,238 84,546
2022-03-31 $7,459,158 85,846
2021-12-31 $8,472,546 83,696
2021-09-30 $6,428,082 88,970
2021-06-30 $6,526,124 89,350
2021-03-31 $3,936,554 59,908
2020-12-31 $2,765,175 58,153
2020-09-30 $7,861,354 263,981
2020-06-30 $9,092,118 267,101
2020-03-31 $7,842,374 264,320