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WESTFIELD CAPITAL MANAGEMENT CO LP

Position in ONTO — Onto Innovation Inc.

CIK 1177719 BOSTON, MA

Position in ONTO

as of Jun 30, 2026 · filed Aug 12, 2026
Position Value
$113,301,496
+$46,251,809 QoQ
Shares Held
299,383
-8.4% QoQ
Ownership
0.610%
of shares outstanding
% of Portfolio
0.37%
of 13F equity value
Holder Rank
#39
of 688 holders
Holding Since
Mar 2023
9 quarters on record
Voting authority Sole 93% Shared 0% None 7%

Common Shares in ONTO Over Time

Shares Held

Position Value (USD)

Position in Semiconductor Equipment & Materials

Technology · as of Jun 30, 2026

WESTFIELD CAPITAL MANAGEMENT CO LP holds $628,046,750 across 6 Semiconductor Equipment & Materials names. ONTO ranks #4 (18.0% of the industry book) .

# Ticker Company Shares Value (USD) Open
4 ONTO
Onto Innovation Inc.
This page
299,383 $113,301,496

All Filings in ONTO

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9 filing rows on record
Report Date Value (USD) Shares
2026-06-30 $113,301,496 299,383
2026-03-31 $67,049,687 326,960
2025-12-31 $76,259,324 483,082
2025-09-30 $61,318,766 474,530
2025-06-30 $35,432,889 351,064
2025-03-31 $24,700,698 203,566
2024-12-31 $46,698,100 280,183
2023-06-30 $26,345,397 226,199
2023-03-31 $26,540,902 302,013