BROWN ADVISORY INC

Position in ONTO — Onto Innovation Inc.

CIK 1345929 BALTIMORE, MD

Position in ONTO

as of Mar 31, 2026 · filed May 15, 2026 Compact

Position Value

$554,919

+$102,966 QoQ

Shares Held

2,706

-5.5% QoQ

Ownership

0.005%

of shares outstanding

% of Portfolio

0.00%

of 13F equity value

Holder Rank

—

not a current holder

Holding Since

Jun 2020

24 quarters on record

Voting authority Sole 99.1130820399113.ToString("F0")% Shared 0.ToString("F0")% None 0.8869179600886918.ToString("F0")%

Technology · as of Mar 31, 2026

BROWN ADVISORY INC holds $589,270,064 across 9 Semiconductor Equipment & Materials names. ONTO ranks #8 (0.1% of the industry book) .

#	Ticker	Company	Shares	Value (USD)
1	ASML	Asml Holding NV	330,565	$436,620,168
2	ENTG	Entegris Inc	617,806	$72,431,574
3	AMAT	Applied Materials Inc /De	103,484	$35,369,794
4	Q	Qnity Electronics, Inc.	172,783	$19,935,702
5	KLAC	Kla Corp	95,741	$14,096,998
6	LRCX	Lam Research Corp	36,237	$7,742,397
7	TER	Teradyne, Inc	7,207	$2,136,587
8	ONTO	Onto Innovation Inc. This page	2,706	$554,919

24 filing rows on record

Report Date	Value (USD)	Shares	Change	Type	Discretion	Filed
2026-03-31	$554,919	2,706	-5.5%	Shares	Defined	2026-05-15
2025-12-31	$451,953	2,863	-23.6%	Shares	Defined	2026-02-13
2025-09-30	$484,316	3,748	-8.1%	Shares	Defined	2025-11-14
2025-06-30	$411,592	4,078	-86.9%	Shares	Defined	2025-08-13
2025-03-31	$3,774,158	31,104	-23.0%	Shares	Defined	2025-04-30
2024-12-31	$6,730,967	40,385	+2.2%	Shares	Defined	2025-02-14
2024-09-30	$8,204,431	39,528	-71.6%	Shares	Defined	2024-11-13
2024-06-30	$30,509,177	138,956	-45.9%	Shares	Defined	2024-08-14
2024-03-31	$46,509,310	256,844	-53.9%	Shares	Defined	2024-04-24
2023-12-31	$85,234,716	557,454	+3.8%	Shares	Defined	2024-02-08
2023-09-30	$68,472,373	536,954	+39.7%	Shares	Defined	2023-10-25
2023-06-30	$44,779,569	384,473	-35.8%	Shares	Defined	2023-07-31
2023-03-31	$52,635,461	598,947	+0.8%	Shares	Defined	2023-05-08
2022-12-31	$40,469,018	594,346	-3.6%	Shares	Defined	2023-02-13
2022-09-30	$39,478,753	616,374	-0.7%	Shares	Defined	2022-11-14
2022-06-30	$43,279,318	620,581	-1.9%	Shares	Defined	2022-11-14
2022-03-31	$54,992,767	632,901	+5.9%	Shares	Defined	2022-11-14
2021-12-31	$60,478,547	597,437	+4.2%	Shares	Defined	2022-01-27
2021-09-30	$41,415,867	573,230	-21.4%	Shares	Defined	2021-11-12
2021-06-30	$53,260,036	729,190	-0.9%	Shares	Defined	2021-07-29
2021-03-31	$48,373,007	736,159	+4.9%	Shares	Defined	2021-05-14
2020-12-31	$33,360,366	701,585	+31.2%	Shares	Defined	2021-02-12
2020-09-30	$15,926,045	534,790	+23.0%	Shares	Defined	2020-11-16
2020-06-30	$14,802,327	434,851	—	Shares	Defined	2020-08-14
No filing history on record for this holder in this stock.