FRONTIER CAPITAL MANAGEMENT CO LLC

Position in ONTO — Onto Innovation Inc.

CIK 351173 Boston, MA

Position in ONTO

as of Jun 30, 2026 · filed Aug 14, 2026 Compact

Position Value

$7,628,416

New position

Shares Held

20,157

first reported quarter

Ownership

0.041%

of shares outstanding

% of Portfolio

0.07%

of 13F equity value

Holder Rank

#197

of 686 holders

Holding Since

Jun 2026

1 quarter on record

Voting authority Sole 76% Shared 0% None 24%

Technology · as of Jun 30, 2026

FRONTIER CAPITAL MANAGEMENT CO LLC holds $221,872,131 across 5 Semiconductor Equipment & Materials names. ONTO ranks #5 (3.4% of the industry book) .

#	Ticker	Company	Shares	Value (USD)
1	UCTT	Ultra Clean Holdings, Inc.	667,532	$95,183,387
2	ENTG	Entegris Inc	351,950	$63,301,727
3	TER	Teradyne, Inc	84,563	$40,914,961
4	COHU	Cohu Inc	200,834	$14,843,640
5	ONTO	Onto Innovation Inc. This page	20,157	$7,628,416

1 filing row on record

Report Date	Value (USD)	Shares	Change	Type	Discretion	Filed
2026-06-30	$7,628,416	20,157	—	Shares	Sole	2026-08-14
No filing history on record for this holder in this stock.