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Driehaus Capital Management LLC

Position in ONTO — Onto Innovation Inc.

CIK 938206 Chicago, IL

Position in ONTO

as of Jun 30, 2026 · filed Aug 14, 2026
Position Value
$134,217,292
+$68,485,385 QoQ
Shares Held
354,650
+10.6% QoQ
Ownership
0.723%
of shares outstanding
% of Portfolio
0.78%
of 13F equity value
Holder Rank
#34
of 686 holders
Holding Since
Sep 2023
9 quarters on record
Voting authority Sole 86% Shared 0% None 14%

Common Shares in ONTO Over Time

Shares Held

Position Value (USD)

Position in Semiconductor Equipment & Materials

Technology · as of Jun 30, 2026

Driehaus Capital Management LLC holds $536,307,442 across 10 Semiconductor Equipment & Materials names. ONTO ranks #2 (25.0% of the industry book) .

# Ticker Company Shares Value (USD) Open
2 ONTO
Onto Innovation Inc.
This page
354,650 $134,217,292

All Filings in ONTO

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9 filing rows on record
Report Date Value (USD) Shares
2026-06-30 $134,217,292 354,650
2026-03-31 $65,731,907 320,534
2025-12-31 $55,095,350 349,014
2025-09-30 $12,982,733 100,470
2024-09-30 $20,197,871 97,311
2024-06-30 $117,633,441 535,769
2024-03-31 $95,146,856 525,441
2023-12-31 $87,139,391 569,911
2023-09-30 $48,361,322 379,245