ROBERTS GLORE & CO INC /IL/

Position in ACLS — Axcelis Technologies Inc

CIK 1017115 DEERFIELD, IL

Position in ACLS

as of Jun 30, 2026 · filed Aug 11, 2026 Compact

Position Value

$217,678

New position

Shares Held

1,149

first reported quarter

Ownership

0.004%

of shares outstanding

% of Portfolio

0.06%

of 13F equity value

Holder Rank

#298

of 439 holders

Holding Since

Jun 2026

1 quarter on record

Voting authority Sole 0% Shared 0% None 100%

Technology · as of Jun 30, 2026

ROBERTS GLORE & CO INC /IL/ holds $10,200,857 across 5 Semiconductor Equipment & Materials names. ACLS ranks #5 (2.1% of the industry book) .

#	Ticker	Company	Shares	Value (USD)
1	ASML	Asml Holding NV	1,962	$3,903,281
2	AMAT	Applied Materials Inc /De	4,659	$3,368,457
3	LRCX	Lam Research Corp	3,458	$1,498,455
4	TER	Teradyne, Inc	2,507	$1,212,986
5	ACLS	Axcelis Technologies Inc This page	1,149	$217,678

1 filing row on record

Report Date	Value (USD)	Shares	Change	Type	Discretion	Filed
2026-06-30	$217,678	1,149	—	Shares	Sole	2026-08-11
No filing history on record for this holder in this stock.