Grantham, Mayo, Van Otterloo & Co. LLC
Position in ACLS — Axcelis Technologies Inc
CIK 1352662
Boston, MA
Position in ACLS
as of Mar 31, 2026
· filed May 14, 2026
Position Value
$31,161,880
+$5,224,192 QoQ
Shares Held
334,786
+3.7% QoQ
Ownership
1.09%
of shares outstanding
% of Portfolio
0.08%
of 13F equity value
Holder Rank
—
not a current holder
Holding Since
Mar 2020
20 quarters on record
Voting authority
Sole 96%
Shared 0%
None 4%
Common Shares in ACLS Over Time
Shares Held
Position Value (USD)
Position in Semiconductor Equipment & Materials
Technology · as of Mar 31, 2026Grantham, Mayo, Van Otterloo & Co. LLC holds $2,458,713,150 across 12 Semiconductor Equipment & Materials names. ACLS ranks #4 (1.3% of the industry book) .
| # | Ticker | Company | Shares | Value (USD) | Open |
|---|---|---|---|---|---|
| 1 | LRCX |
Lam Research Corp
|
6,904,206 | $1,475,152,653 | |
| 2 | KLAC |
Kla Corp
|
461,202 | $679,078,436 | |
| 3 | ASML |
Asml Holding NV
|
154,570 | $204,160,693 | |
| 4 | ACLS |
Axcelis Technologies Inc
This page
|
334,786 | $31,161,880 | |
| 5 | ONTO |
Onto Innovation Inc.
|
136,474 | $27,986,723 | |
| 6 | ENTG |
Entegris Inc
|
120,864 | $14,170,095 | |
| 7 | VECO |
Veeco Instruments Inc
|
365,022 | $12,359,644 | |
| 8 | AMAT |
Applied Materials Inc /De
|
21,315 | $7,285,253 |
All Filings in ACLS
Export CSV
20 filing rows on record
| Report Date | Value (USD) | Shares | Type | Discretion | Filed | |
|---|---|---|---|---|---|---|
| 2026-03-31 | $31,161,880 | 334,786 | Shares | Sole | 2026-05-14 | |
| 2025-12-31 | $25,937,688 | 322,849 | Shares | Sole | 2026-02-17 | |
| 2025-09-30 | $43,338,783 | 443,863 | Shares | Sole | 2025-11-13 | |
| 2025-06-30 | $30,807,509 | 442,065 | Shares | Sole | 2025-08-13 | |
| 2025-03-31 | $28,778,152 | 579,387 | Shares | Sole | 2025-05-14 | |
| 2024-12-31 | $53,385,501 | 764,069 | Shares | Sole | 2025-02-13 | |
| 2024-09-30 | $52,002,559 | 495,971 | Shares | Sole | 2024-11-13 | |
| 2024-06-30 | $39,953,114 | 280,984 | Shares | Sole | 2024-08-13 | |
| 2024-03-31 | $30,713,277 | 275,406 | Shares | Sole | 2024-05-14 | |
| 2023-12-31 | $18,544,502 | 142,991 | Shares | Sole | 2024-02-13 | |
| 2023-09-30 | $19,538,118 | 119,829 | Shares | Sole | 2023-11-13 | |
| 2023-06-30 | $23,925,664 | 130,506 | Shares | Sole | 2023-08-14 | |
| 2023-03-31 | $18,161,975 | 136,300 | Shares | Sole | 2023-05-12 | |
| 2022-12-31 | $7,704,586 | 97,084 | Shares | Sole | 2023-02-13 | |
| 2022-09-30 | $10,161,241 | 167,788 | Shares | Sole | 2022-11-10 | |
| 2022-06-30 | $4,025,256 | 73,400 | Shares | Sole | 2022-08-12 | |
| 2022-03-31 | $2,107,287 | 27,900 | Shares | Sole | 2022-05-13 | |
| 2020-09-30 | $418,000 | 19,000 | Shares | Sole | 2020-11-13 | |
| 2020-06-30 | $1,506,685 | 54,100 | Shares | Sole | 2020-08-13 | |
| 2020-03-31 | $1,120,572 | 61,200 | Shares | Sole | 2020-05-14 | |
| No filing history on record for this holder in this stock. | ||||||