Grantham, Mayo, Van Otterloo & Co. LLC
Position in ONTO — Onto Innovation Inc.
CIK 1352662
Boston, MA
Position in ONTO
as of Jun 30, 2026
· filed Aug 13, 2026
Position Value
$50,039,794
+$22,053,071 QoQ
Shares Held
132,223
-3.1% QoQ
Ownership
0.269%
of shares outstanding
% of Portfolio
0.11%
of 13F equity value
Holder Rank
#79
of 686 holders
Holding Since
Mar 2020
5 quarters on record
Voting authority
Sole 100%
Shared 0%
None 0%
Common Shares in ONTO Over Time
Shares Held
Position Value (USD)
Position in Semiconductor Equipment & Materials
Technology · as of Jun 30, 2026Grantham, Mayo, Van Otterloo & Co. LLC holds $3,977,292,452 across 11 Semiconductor Equipment & Materials names. ONTO ranks #4 (1.3% of the industry book) .
| # | Ticker | Company | Shares | Value (USD) | Open |
|---|---|---|---|---|---|
| 1 | LRCX |
Lam Research Corp
|
5,464,726 | $2,368,029,717 | |
| 2 | KLAC |
Kla Corp
|
3,893,893 | $1,174,826,457 | |
| 3 | ASML |
Asml Holding NV
|
151,987 | $302,369,002 | |
| 4 | ONTO |
Onto Innovation Inc.
This page
|
132,223 | $50,039,794 | |
| 5 | ACLS |
Axcelis Technologies Inc
|
135,580 | $25,685,631 | |
| 6 | VECO |
Veeco Instruments Inc
|
318,646 | $24,153,366 | |
| 7 | ENTG |
Entegris Inc
|
72,607 | $13,059,095 | |
| 8 | AMAT |
Applied Materials Inc /De
|
15,644 | $11,310,612 |
All Filings in ONTO
Export CSV
5 filing rows on record
| Report Date | Value (USD) | Shares | Type | Discretion | Filed | |
|---|---|---|---|---|---|---|
| 2026-06-30 | $50,039,794 | 132,223 | Shares | Sole | 2026-08-13 | |
| 2026-03-31 | $27,986,723 | 136,474 | Shares | Sole | 2026-05-14 | |
| 2025-03-31 | $34,531,786 | 284,587 | Shares | Sole | 2025-05-14 | |
| 2020-06-30 | $389,315 | 11,437 | Shares | Sole | 2020-08-13 | |
| 2020-03-31 | $3,456,169 | 116,487 | Shares | Sole | 2020-05-14 | |
| No filing history on record for this holder in this stock. | ||||||