Legato Capital Management LLC

Position in ACLS — Axcelis Technologies Inc

CIK 1442641 San Francisco, CA

Position in ACLS

as of Jun 30, 2026 · filed Aug 6, 2026 Compact

Position Value

$1,221,194

+$231,935 QoQ

Shares Held

6,446

-31.7% QoQ

Ownership

0.021%

of shares outstanding

% of Portfolio

0.21%

of 13F equity value

Holder Rank

#169

of 439 holders

Holding Since

Dec 2022

9 quarters on record

Technology · as of Jun 30, 2026

Legato Capital Management LLC holds $21,621,779 across 8 Semiconductor Equipment & Materials names. ACLS ranks #6 (5.6% of the industry book) .

#	Ticker	Company	Shares	Value (USD)
1	COHU	Cohu Inc	91,448	$6,758,921
2	FORM	Formfactor Inc	24,456	$3,911,248
3	ONTO	Onto Innovation Inc.	9,812	$3,713,351
4	KLAC	Kla Corp	8,269	$2,494,839
5	KLIC	Kulicke & Soffa Industries Inc	18,441	$2,466,668
6	ACLS	Axcelis Technologies Inc This page	6,446	$1,221,194
7	LRCX	Lam Research Corp	1,962	$850,193
8	ASYS	Amtech Systems Inc	8,898	$205,365

9 filing rows on record

Report Date	Value (USD)	Shares	Change	Type	Discretion	Filed
2026-06-30	$1,221,194	6,446	-31.7%	Shares	Other	2026-08-06
2024-09-30	$989,259	9,435	0.0%	Shares	Other	2024-11-07
2024-06-30	$1,341,562	9,435	0.0%	Shares	Other	2024-07-26
2024-03-31	$1,052,191	9,435	-10.4%	Shares	Other	2024-04-15
2023-12-31	$1,366,024	10,533	-24.9%	Shares	Other	2024-01-16
2023-09-30	$2,285,634	14,018	-5.8%	Shares	Other	2023-10-12
2023-06-30	$2,728,500	14,883	+78.0%	Shares	Other	2023-08-18
2023-03-31	$1,114,369	8,363	-22.6%	Shares	Other	2023-05-25
2022-12-31	$857,246	10,802	—	Shares	Other	2023-02-01
No filing history on record for this holder in this stock.