UBS AM, a distinct business unit of UBS ASSET MANAGEMENT AMERICAS LLC

Position in ACLS — Axcelis Technologies Inc

CIK 861177 NEW YORK, NY

Back to ACLS Full portfolio

Position in ACLS

as of Mar 31, 2026 · filed May 13, 2026 Compact

Position Value

$6,008,309

+$1,099,779 QoQ

Shares Held

64,550

+5.7% QoQ

Ownership

0.210%

of shares outstanding

% of Portfolio

0.00%

of 13F equity value

Holder Rank

—

not a current holder

Holding Since

Mar 2020

24 quarters on record

Voting authority Sole 37% Shared 0% None 63%

Common Shares in ACLS Over Time

Shares Held

Position Value (USD)

Position in Semiconductor Equipment & Materials

Technology · as of Mar 31, 2026

UBS AM, a distinct business unit of UBS ASSET MANAGEMENT AMERICAS LLC holds $8,894,281,554 across 26 Semiconductor Equipment & Materials names. ACLS ranks #15 (0.1% of the industry book) .

#	Ticker	Company	Shares	Value (USD)
1	AMAT	Applied Materials Inc /De	9,997,208	$3,416,945,716
2	LRCX	Lam Research Corp	13,424,016	$2,868,175,253
3	KLAC	Kla Corp	1,105,007	$1,627,023,351
4	TER	Teradyne, Inc	1,965,465	$582,681,747
5	Q	Qnity Electronics, Inc.	1,298,607	$149,833,270
6	ENTG	Entegris Inc	677,297	$79,406,296
7	ASML	Asml Holding NV	31,357	$41,417,265
8	ONTO	Onto Innovation Inc.	147,982	$30,346,663

All Filings in ACLS

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24 filing rows on record

Report Date	Value (USD)	Shares	Change	Type	Discretion	Filed
2026-03-31	$6,008,309	64,550	+5.7%	Shares	Defined	2026-05-13
2025-12-31	$4,908,530	61,097	-7.6%	Shares	Defined	2026-02-13
2025-09-30	$6,453,805	66,098	-40.7%	Shares	Defined	2025-11-14
2025-06-30	$7,762,766	111,390	+41.4%	Shares	Defined	2025-08-14
2025-03-31	$3,911,807	78,756	+1.1%	Shares	Defined	2025-05-19
2024-12-31	$5,444,268	77,920	+3.5%	Shares	Defined	2025-02-14
2024-09-30	$7,895,098	75,299	-38.5%	Shares	Defined	2024-11-14
2024-06-30	$17,417,845	122,497	+231.9%	Shares	Defined	2024-08-14
2024-03-31	$4,115,420	36,903	-5.5%	Shares	Defined	2024-05-15
2023-12-31	$5,066,986	39,070	+5.0%	Shares	Defined	2024-02-14
2023-09-30	$6,066,762	37,208	-14.2%	Shares	Defined	2023-11-13
2023-06-30	$7,947,537	43,351	0.0%	Shares	Defined	2023-08-11
2023-03-31	$5,776,520	43,351	+7.5%	Shares	Defined	2023-05-15
2022-09-30	$2,441,171	40,310	-3.7%	Shares	Defined	2022-11-14
2022-06-30	$2,296,697	41,880	0.0%	Shares	Defined	2022-08-12
2022-03-31	$3,163,194	41,880	+14.0%	Shares	Defined	2022-05-16
2021-12-31	$2,737,990	36,722	-3.8%	Shares	Other	2022-02-14
2021-09-30	$1,795,039	38,168	+23.4%	Shares	Sole	2021-11-15
2021-06-30	$1,250,512	30,938	+22.2%	Shares	Sole	2021-08-16
2021-03-31	$1,040,521	25,323	0.0%	Shares	Sole	2021-05-14
2020-12-31	$737,404	25,323	-11.7%	Shares	Sole	2021-03-01
2020-09-30	$630,718	28,669	+15.3%	Shares	Sole	2020-11-13
2020-06-30	$692,656	24,871	-26.1%	Shares	Sole	2020-08-14
2020-03-31	$616,277	33,658	—	Shares	Defined	2020-05-15
No filing history on record for this holder in this stock.