ROYCE & ASSOCIATES LP

Position in ACLS — Axcelis Technologies Inc

CIK 906304 New York, NY

Back to ACLS Full portfolio

Position in ACLS

as of Jun 30, 2026 · filed Aug 14, 2026 Compact

Position Value

$12,446,865

+$785,803 QoQ

Shares Held

65,700

-47.6% QoQ

Ownership

0.213%

of shares outstanding

% of Portfolio

0.10%

of 13F equity value

Holder Rank

#55

of 441 holders

Holding Since

Mar 2020

26 quarters on record

Voting authority Sole 100% Shared 0% None 0%

Common Shares in ACLS Over Time

Shares Held

Position Value (USD)

Position in Semiconductor Equipment & Materials

Technology · as of Jun 30, 2026

ROYCE & ASSOCIATES LP holds $585,907,278 across 15 Semiconductor Equipment & Materials names. ACLS ranks #13 (2.1% of the industry book) .

#	Ticker	Company	Shares	Value (USD)
1	ONTO	Onto Innovation Inc.	286,087	$108,269,625
2	UCTT	Ultra Clean Holdings, Inc.	666,496	$95,035,664
3	COHU	Cohu Inc	938,030	$69,329,797
4	ICHR	Ichor Holdings, Ltd.	608,109	$68,278,478
5	KLIC	Kulicke & Soffa Industries Inc	306,723	$41,027,268
6	FORM	Formfactor Inc	234,556	$37,512,541
7	CAMT	Camtek Ltd	210,711	$34,371,178
8	NVMI	Nova Ltd.	54,029	$29,334,505

All Filings in ACLS

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26 filing rows on record

Report Date	Value (USD)	Shares	Change	Type	Discretion	Filed
2026-06-30	$12,446,865	65,700	-47.6%	Shares	Sole	2026-08-14
2026-03-31	$11,661,062	125,280	+7.7%	Shares	Sole	2026-05-12
2025-12-31	$9,349,567	116,375	-19.6%	Shares	Sole	2026-02-09
2025-09-30	$14,129,289	144,708	-45.4%	Shares	Sole	2025-11-12
2025-06-30	$18,470,498	265,038	-5.7%	Shares	Sole	2025-08-11
2025-03-31	$13,956,425	280,983	-15.7%	Shares	Sole	2025-05-06
2024-12-31	$23,296,474	333,426	+21.8%	Shares	Sole	2025-02-10
2024-09-30	$28,694,404	273,671	+157.1%	Shares	Sole	2024-11-06
2024-06-30	$15,134,134	106,436	+63.4%	Shares	Sole	2024-08-13
2024-03-31	$7,262,740	65,125	-8.4%	Shares	Sole	2024-05-13
2023-12-31	$9,220,440	71,096	-17.1%	Shares	Sole	2024-02-12
2023-09-30	$13,985,124	85,772	-13.9%	Shares	Sole	2023-11-09
2023-06-30	$18,269,017	99,651	-35.5%	Shares	Sole	2023-08-07
2023-03-31	$20,597,118	154,575	-31.2%	Shares	Sole	2023-05-23
2022-12-31	$17,820,446	224,552	+10.1%	Shares	Sole	2023-05-23
2022-09-30	$12,353,573	203,989	+19.1%	Shares	Sole	2022-11-03
2022-06-30	$9,394,421	171,306	+48.5%	Shares	Sole	2022-08-04
2022-03-31	$8,714,047	115,372	-38.1%	Shares	Sole	2022-05-05
2021-12-31	$13,897,387	186,392	-72.5%	Shares	Sole	2022-02-07
2021-09-30	$31,875,287	677,765	-28.6%	Shares	Sole	2021-11-10
2021-06-30	$38,371,312	949,315	-5.8%	Shares	Sole	2021-08-06
2021-03-31	$41,397,188	1,007,476	-6.4%	Shares	Sole	2021-05-10
2020-12-31	$31,327,761	1,075,816	+10.7%	Shares	Sole	2021-02-08
2020-09-30	$21,371,152	971,416	+45.4%	Shares	Sole	2020-11-12
2020-06-30	$18,604,245	668,016	-28.3%	Shares	Sole	2020-08-07
2020-03-31	$17,060,708	931,770	—	Shares	Sole	2020-05-12
No filing history on record for this holder in this stock.