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ROYCE & ASSOCIATES LP

Position in ACLS — Axcelis Technologies Inc

CIK 906304 New York, NY

Position in ACLS

as of Mar 31, 2026 · filed May 12, 2026
Position Value
$11,661,062
+$2,311,495 QoQ
Shares Held
125,280
+7.7% QoQ
Ownership
0.408%
of shares outstanding
% of Portfolio
0.12%
of 13F equity value
Holder Rank
not a current holder
Holding Since
Mar 2020
25 quarters on record
Voting authority Sole 100% Shared 0% None 0%

Common Shares in ACLS Over Time

Shares Held

Position Value (USD)

Position in Semiconductor Equipment & Materials

Technology · as of Mar 31, 2026

ROYCE & ASSOCIATES LP holds $447,927,573 across 15 Semiconductor Equipment & Materials names. ACLS ranks #14 (2.6% of the industry book) .

# Ticker Company Shares Value (USD) Open

All Filings in ACLS

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25 filing rows on record
Report Date Value (USD) Shares
2026-03-31 $11,661,062 125,280
2025-12-31 $9,349,567 116,375
2025-09-30 $14,129,289 144,708
2025-06-30 $18,470,498 265,038
2025-03-31 $13,956,425 280,983
2024-12-31 $23,296,474 333,426
2024-09-30 $28,694,404 273,671
2024-06-30 $15,134,134 106,436
2024-03-31 $7,262,740 65,125
2023-12-31 $9,220,440 71,096
2023-09-30 $13,985,124 85,772
2023-06-30 $18,269,017 99,651
2023-03-31 $20,597,118 154,575
2022-12-31 $17,820,446 224,552
2022-09-30 $12,353,573 203,989
2022-06-30 $9,394,421 171,306
2022-03-31 $8,714,047 115,372
2021-12-31 $13,897,387 186,392
2021-09-30 $31,875,287 677,765
2021-06-30 $38,371,312 949,315
2021-03-31 $41,397,188 1,007,476
2020-12-31 $31,327,761 1,075,816
2020-09-30 $21,371,152 971,416
2020-06-30 $18,604,245 668,016
2020-03-31 $17,060,708 931,770