Skip to main content
Equibles

GLOBEFLEX CAPITAL L P

Position in ACLS — Axcelis Technologies Inc

CIK 921531 SAN DIEGO, CA
Back to ACLS Full portfolio

Position in ACLS

as of Jun 30, 2026 · filed Aug 12, 2026
Position Value
$7,419,240
+$3,281,369 QoQ
Shares Held
39,162
-11.9% QoQ
Ownership
0.127%
of shares outstanding
% of Portfolio
0.96%
of 13F equity value
Holder Rank
—
not a current holder
Holding Since
Mar 2020
26 quarters on record
Voting authority Sole 100% Shared 0% None 0%

Common Shares in ACLS Over Time

Shares Held

Position Value (USD)

Position in Semiconductor Equipment & Materials

Technology · as of Jun 30, 2026

GLOBEFLEX CAPITAL L P holds $34,582,881 across 11 Semiconductor Equipment & Materials names. ACLS ranks #2 (21.5% of the industry book) .

# Ticker Company Shares Value (USD) Open
1 KLIC
Kulicke & Soffa Industries Inc
 88,998 $11,904,372
2 ACLS
Axcelis Technologies Inc
This page 		39,162 $7,419,240
3 ONTO
Onto Innovation Inc.
 14,549 $5,506,069
4 AMAT
Applied Materials Inc /De
 4,496 $3,250,608
5 KLAC
Kla Corp
 8,710 $2,627,894
6 INTT
Intest Corp
 122,730 $2,230,004
7 UCTT
Ultra Clean Holdings, Inc.
 5,059 $721,362
8 LRCX
Lam Research Corp
 1,637 $709,361

All Filings in ACLS

Export CSV
26 filing rows on record
Report Date Value (USD) Shares
2026-06-30 $7,419,240 39,162
2026-03-31 $4,137,871 44,455
2025-12-31 $4,498,798 55,997
2025-09-30 $5,467,547 55,997
2025-06-30 $3,032,351 43,512
2025-03-31 $921,527 18,553
2024-12-31 $1,177,030 16,846
2024-09-30 $1,512,670 14,427
2024-06-30 $550,559 3,872
2024-03-31 $1,016,616 9,116
2023-12-31 $1,211,045 9,338
2023-09-30 $1,522,560 9,338
2023-06-30 $1,712,852 9,343
2023-03-31 $1,268,673 9,521
2022-12-31 $1,155,640 14,562
2022-09-30 $869,520 14,358
2022-06-30 $1,400,229 25,533
2022-03-31 $3,892,589 51,537
2021-12-31 $3,429,685 45,999
2021-09-30 $2,163,332 45,999
2021-06-30 $2,875,155 71,132
2021-03-31 $2,547,004 61,986
2020-12-31 $1,492,807 51,264
2020-09-30 $1,094,500 49,750
2020-06-30 $793,641 28,497
2020-03-31 $351,442 19,194