GLOBEFLEX CAPITAL L P

Position in ACLS — Axcelis Technologies Inc

CIK 921531 SAN DIEGO, CA

Position in ACLS

as of Mar 31, 2026 · filed May 13, 2026 Compact

Position Value

$4,137,871

-$360,927 QoQ

Shares Held

44,455

-20.6% QoQ

Ownership

0.145%

of shares outstanding

% of Portfolio

0.64%

of 13F equity value

Holder Rank

—

not a current holder

Holding Since

Mar 2020

25 quarters on record

Voting authority Sole 100% Shared 0% None 0%

Technology · as of Mar 31, 2026

GLOBEFLEX CAPITAL L P holds $17,982,337 across 7 Semiconductor Equipment & Materials names. ACLS ranks #2 (23.0% of the industry book) .

#	Ticker	Company	Shares	Value (USD)
1	KLIC	Kulicke & Soffa Industries Inc	98,028	$6,442,400
2	ACLS	Axcelis Technologies Inc This page	44,455	$4,137,871
3	ONTO	Onto Innovation Inc.	12,750	$2,614,642
4	INTT	Intest Corp	118,572	$1,618,507
5	AMAT	Applied Materials Inc /De	4,496	$1,536,687
6	KLAC	Kla Corp	871	$1,282,469
7	LRCX	Lam Research Corp	1,637	$349,761

25 filing rows on record

Report Date	Value (USD)	Shares	Change	Type	Discretion	Filed
2026-03-31	$4,137,871	44,455	-20.6%	Shares	Sole	2026-05-13
2025-12-31	$4,498,798	55,997	0.0%	Shares	Sole	2026-02-11
2025-09-30	$5,467,547	55,997	+28.7%	Shares	Sole	2025-11-12
2025-06-30	$3,032,351	43,512	+134.5%	Shares	Sole	2025-08-14
2025-03-31	$921,527	18,553	+10.1%	Shares	Sole	2025-05-12
2024-12-31	$1,177,030	16,846	+16.8%	Shares	Sole	2025-02-10
2024-09-30	$1,512,670	14,427	+272.6%	Shares	Sole	2024-11-13
2024-06-30	$550,559	3,872	-57.5%	Shares	Sole	2024-08-13
2024-03-31	$1,016,616	9,116	-2.4%	Shares	Sole	2024-05-14
2023-12-31	$1,211,045	9,338	0.0%	Shares	Sole	2024-02-13
2023-09-30	$1,522,560	9,338	-0.1%	Shares	Sole	2023-11-13
2023-06-30	$1,712,852	9,343	-1.9%	Shares	Sole	2023-08-14
2023-03-31	$1,268,673	9,521	-34.6%	Shares	Sole	2023-05-12
2022-12-31	$1,155,640	14,562	+1.4%	Shares	Sole	2023-02-10
2022-09-30	$869,520	14,358	-43.8%	Shares	Sole	2022-11-14
2022-06-30	$1,400,229	25,533	-50.5%	Shares	Sole	2022-08-15
2022-03-31	$3,892,589	51,537	+12.0%	Shares	Sole	2022-05-13
2021-12-31	$3,429,685	45,999	0.0%	Shares	Sole	2022-02-10
2021-09-30	$2,163,332	45,999	-35.3%	Shares	Sole	2021-11-12
2021-06-30	$2,875,155	71,132	+14.8%	Shares	Sole	2021-08-12
2021-03-31	$2,547,004	61,986	+20.9%	Shares	Sole	2021-05-14
2020-12-31	$1,492,807	51,264	+3.0%	Shares	Sole	2021-02-11
2020-09-30	$1,094,500	49,750	+74.6%	Shares	Sole	2020-11-13
2020-06-30	$793,641	28,497	+48.5%	Shares	Sole	2020-08-12
2020-03-31	$351,442	19,194	—	Shares	Sole	2020-05-13
No filing history on record for this holder in this stock.