Position in ONTO
as of Mar 31, 2026
· filed May 13, 2026
Position Value
$2,614,642
+$115,313 QoQ
Shares Held
12,750
-48.5% QoQ
Ownership
0.026%
of shares outstanding
% of Portfolio
0.40%
of 13F equity value
Holder Rank
—
not a current holder
Holding Since
Sep 2024
4 quarters on record
Voting authority
Sole 100%
Shared 0%
None 0%
Common Shares in ONTO Over Time
Shares Held
Position Value (USD)
Position in Semiconductor Equipment & Materials
Technology · as of Mar 31, 2026GLOBEFLEX CAPITAL L P holds $17,982,337 across 7 Semiconductor Equipment & Materials names. ONTO ranks #3 (14.5% of the industry book) .
| # | Ticker | Company | Shares | Value (USD) | Open |
|---|---|---|---|---|---|
| 1 | KLIC |
Kulicke & Soffa Industries Inc
|
98,028 | $6,442,400 | |
| 2 | ACLS |
Axcelis Technologies Inc
|
44,455 | $4,137,871 | |
| 3 | ONTO |
Onto Innovation Inc.
This page
|
12,750 | $2,614,642 | |
| 4 | INTT |
Intest Corp
|
118,572 | $1,618,507 | |
| 5 | AMAT |
Applied Materials Inc /De
|
4,496 | $1,536,687 | |
| 6 | KLAC |
Kla Corp
|
871 | $1,282,469 | |
| 7 | LRCX |
Lam Research Corp
|
1,637 | $349,761 |
All Filings in ONTO
Export CSV
4 filing rows on record
| Report Date | Value (USD) | Shares | Type | Discretion | Filed | |
|---|---|---|---|---|---|---|
| 2026-03-31 | $2,614,642 | 12,750 | Shares | Sole | 2026-05-13 | |
| 2025-06-30 | $2,499,329 | 24,763 | Shares | Sole | 2025-08-14 | |
| 2024-12-31 | $90,168 | 541 | Shares | Sole | 2025-02-10 | |
| 2024-09-30 | $112,289 | 541 | Shares | Sole | 2024-11-13 | |
| No filing history on record for this holder in this stock. | ||||||