TRILLIUM ASSET MANAGEMENT, LLC

Position in ENTG — Entegris Inc

CIK 884541 BOSTON, MA

Position in ENTG

as of Jun 30, 2026 · filed Aug 11, 2026 Compact

Position Value

$4,662,870

New position

Shares Held

25,925

first reported quarter

Ownership

0.017%

of shares outstanding

% of Portfolio

0.14%

of 13F equity value

Holder Rank

#235

of 738 holders

Holding Since

Jun 2026

1 quarter on record

Voting authority Sole 96% Shared 0% None 4%

Technology · as of Jun 30, 2026

TRILLIUM ASSET MANAGEMENT, LLC holds $119,931,597 across 5 Semiconductor Equipment & Materials names. ENTG ranks #3 (3.9% of the industry book) .

#	Ticker	Company	Shares	Value (USD)
1	ASML	Asml Holding NV	33,501	$66,648,226
2	AMAT	Applied Materials Inc /De	61,218	$44,260,614
3	ENTG	Entegris Inc This page	25,925	$4,662,870
4	IPGP	Ipg Photonics Corp	33,562	$3,937,493
5	KLAC	Kla Corp	1,400	$422,394

1 filing row on record

Report Date	Value (USD)	Shares	Change	Type	Discretion	Filed
2026-06-30	$4,662,870	25,925	—	Shares	Defined	2026-08-11
No filing history on record for this holder in this stock.