ROYCE & ASSOCIATES LP

Position in VECO — Veeco Instruments Inc

CIK 906304 New York, NY

Position in VECO

as of Jun 30, 2026 · filed Aug 14, 2026 Compact

Position Value

$19,622,042

+$3,441,500 QoQ

Shares Held

258,866

-45.8% QoQ

Ownership

0.423%

of shares outstanding

% of Portfolio

0.16%

of 13F equity value

Holder Rank

#41

of 327 holders

Holding Since

Mar 2020

26 quarters on record

Voting authority Sole 100% Shared 0% None 0%

Technology · as of Jun 30, 2026

ROYCE & ASSOCIATES LP holds $585,907,278 across 15 Semiconductor Equipment & Materials names. VECO ranks #10 (3.3% of the industry book) .

#	Ticker	Company	Shares	Value (USD)
1	ONTO	Onto Innovation Inc.	286,087	$108,269,625
2	UCTT	Ultra Clean Holdings, Inc.	666,496	$95,035,664
3	COHU	Cohu Inc	938,030	$69,329,797
4	ICHR	Ichor Holdings, Ltd.	608,109	$68,278,478
5	KLIC	Kulicke & Soffa Industries Inc	306,723	$41,027,268
6	FORM	Formfactor Inc	234,556	$37,512,541
7	CAMT	Camtek Ltd	210,711	$34,371,178
8	NVMI	Nova Ltd.	54,029	$29,334,505

26 filing rows on record

Report Date	Value (USD)	Shares	Change	Type	Discretion	Filed
2026-06-30	$19,622,042	258,866	-45.8%	Shares	Sole	2026-08-14
2026-03-31	$16,180,542	477,866	+3.3%	Shares	Sole	2026-05-12
2025-12-31	$13,216,049	462,423	-11.0%	Shares	Sole	2026-02-09
2025-09-30	$15,810,606	519,573	+1.8%	Shares	Sole	2025-11-12
2025-06-30	$10,369,966	510,333	+7.0%	Shares	Sole	2025-08-11
2025-03-31	$9,577,417	476,963	+5.9%	Shares	Sole	2025-05-06
2024-12-31	$12,070,800	450,403	+20.5%	Shares	Sole	2025-02-10
2024-09-30	$12,378,792	373,643	+4.0%	Shares	Sole	2024-11-06
2024-06-30	$16,781,641	359,273	-15.4%	Shares	Sole	2024-08-13
2024-03-31	$14,944,260	424,915	-7.3%	Shares	Sole	2024-05-13
2023-12-31	$14,224,400	458,408	-14.5%	Shares	Sole	2024-02-12
2023-09-30	$15,078,428	536,408	-6.0%	Shares	Sole	2023-11-09
2023-06-30	$14,652,982	570,599	-16.9%	Shares	Sole	2023-08-07
2023-03-31	$14,503,610	686,399	-2.1%	Shares	Sole	2023-05-23
2022-12-31	$13,024,561	700,999	-4.5%	Shares	Sole	2023-05-23
2022-09-30	$13,448,693	734,099	-1.0%	Shares	Sole	2022-11-03
2022-06-30	$14,379,260	741,199	+5.6%	Shares	Sole	2022-08-04
2022-03-31	$19,076,476	701,599	-3.2%	Shares	Sole	2022-05-05
2021-12-31	$20,626,486	724,499	-0.8%	Shares	Sole	2022-02-07
2021-09-30	$16,228,824	730,699	-5.2%	Shares	Sole	2021-11-10
2021-06-30	$18,525,584	770,615	+13.1%	Shares	Sole	2021-08-06
2021-03-31	$14,128,399	681,215	-13.6%	Shares	Sole	2021-05-10
2020-12-31	$13,692,092	788,715	+18.2%	Shares	Sole	2021-02-08
2020-09-30	$7,789,865	667,512	-0.4%	Shares	Sole	2020-11-12
2020-06-30	$9,045,206	670,512	-2.5%	Shares	Sole	2020-08-07
2020-03-31	$6,579,872	687,552	—	Shares	Sole	2020-05-12
No filing history on record for this holder in this stock.