Position in VECO
as of Mar 31, 2026
· filed May 12, 2026
Position Value
$16,180,542
+$2,964,493 QoQ
Shares Held
477,866
+3.3% QoQ
Ownership
0.783%
of shares outstanding
% of Portfolio
0.16%
of 13F equity value
Holder Rank
—
not a current holder
Holding Since
Mar 2020
25 quarters on record
Voting authority
Sole 100%
Shared 0%
None 0%
Common Shares in VECO Over Time
Shares Held
Position Value (USD)
Position in Semiconductor Equipment & Materials
Technology · as of Mar 31, 2026ROYCE & ASSOCIATES LP holds $447,927,573 across 15 Semiconductor Equipment & Materials names. VECO ranks #10 (3.6% of the industry book) .
| # | Ticker | Company | Shares | Value (USD) | Open |
|---|---|---|---|---|---|
| 1 | ONTO |
Onto Innovation Inc.
|
317,109 | $65,029,542 | |
| 2 | COHU |
Cohu Inc
|
2,027,717 | $62,088,694 | |
| 3 | UCTT |
Ultra Clean Holdings, Inc.
|
759,497 | $47,225,523 | |
| 4 | FORM |
Formfactor Inc
|
451,863 | $43,826,192 | |
| 5 | ICHR |
Ichor Holdings, Ltd.
|
849,336 | $39,587,550 | |
| 6 | KLIC |
Kulicke & Soffa Industries Inc
|
587,147 | $38,587,300 | |
| 7 | CAMT |
Camtek Ltd
|
202,488 | $30,699,205 | |
| 8 | NVMI |
Nova Ltd.
|
65,830 | $28,588,652 |
All Filings in VECO
Export CSV
25 filing rows on record
| Report Date | Value (USD) | Shares | Type | Discretion | Filed | |
|---|---|---|---|---|---|---|
| 2026-03-31 | $16,180,542 | 477,866 | Shares | Sole | 2026-05-12 | |
| 2025-12-31 | $13,216,049 | 462,423 | Shares | Sole | 2026-02-09 | |
| 2025-09-30 | $15,810,606 | 519,573 | Shares | Sole | 2025-11-12 | |
| 2025-06-30 | $10,369,966 | 510,333 | Shares | Sole | 2025-08-11 | |
| 2025-03-31 | $9,577,417 | 476,963 | Shares | Sole | 2025-05-06 | |
| 2024-12-31 | $12,070,800 | 450,403 | Shares | Sole | 2025-02-10 | |
| 2024-09-30 | $12,378,792 | 373,643 | Shares | Sole | 2024-11-06 | |
| 2024-06-30 | $16,781,641 | 359,273 | Shares | Sole | 2024-08-13 | |
| 2024-03-31 | $14,944,260 | 424,915 | Shares | Sole | 2024-05-13 | |
| 2023-12-31 | $14,224,400 | 458,408 | Shares | Sole | 2024-02-12 | |
| 2023-09-30 | $15,078,428 | 536,408 | Shares | Sole | 2023-11-09 | |
| 2023-06-30 | $14,652,982 | 570,599 | Shares | Sole | 2023-08-07 | |
| 2023-03-31 | $14,503,610 | 686,399 | Shares | Sole | 2023-05-23 | |
| 2022-12-31 | $13,024,561 | 700,999 | Shares | Sole | 2023-05-23 | |
| 2022-09-30 | $13,448,693 | 734,099 | Shares | Sole | 2022-11-03 | |
| 2022-06-30 | $14,379,260 | 741,199 | Shares | Sole | 2022-08-04 | |
| 2022-03-31 | $19,076,476 | 701,599 | Shares | Sole | 2022-05-05 | |
| 2021-12-31 | $20,626,486 | 724,499 | Shares | Sole | 2022-02-07 | |
| 2021-09-30 | $16,228,824 | 730,699 | Shares | Sole | 2021-11-10 | |
| 2021-06-30 | $18,525,584 | 770,615 | Shares | Sole | 2021-08-06 | |
| 2021-03-31 | $14,128,399 | 681,215 | Shares | Sole | 2021-05-10 | |
| 2020-12-31 | $13,692,092 | 788,715 | Shares | Sole | 2021-02-08 | |
| 2020-09-30 | $7,789,865 | 667,512 | Shares | Sole | 2020-11-12 | |
| 2020-06-30 | $9,045,206 | 670,512 | Shares | Sole | 2020-08-07 | |
| 2020-03-31 | $6,579,872 | 687,552 | Shares | Sole | 2020-05-12 | |
| No filing history on record for this holder in this stock. | ||||||