Russell J. Low

Board Member

CEO

Personal wealth note: Equibles reports source-backed professional activity and disclosed compensation; it does not estimate personal net worth.

Affiliation history

Recorded current and former roles; source labels appear when available.

Recorded roles and earnings-call appearances connecting this person to public companies.

ACLS

Current role

Board Member, CEO

2023-05-11–present

1 call Latest call 2026-02-17

Compensation components disclosed in company proxy statements. Amounts are nominal USD; total is the company-reported figure.

Fiscal year	Company	Role	Salary	Bonus	Stock awards	Option awards	Incentive	Other	Total
2020	Axcelis Technologies Inc (ACLS)	Executive Vice President, Engineering (title during 2020)	$342,692	—	$593,410	—	$363,322	$8,550	$1,307,974
2019	Axcelis Technologies Inc (ACLS)	Executive Vice President, Engineering (title during 2020)	$318,577	—	$452,177	—	—	$8,400	$779,154
2018	Axcelis Technologies Inc (ACLS)	Executive Vice President, Engineering (title during 2020)	$325,384	—	$364,269	—	$185,664	$8,250	$883,568
2017	Axcelis Technologies Inc (ACLS)	Executive Vice President, Engineering	$300,000	—	$276,667	—	$330,660	$8,100	$915,427

Earnings-call appearances and filed executive appointments or departures, newest first.