ACLS · Axcelis Technologies Inc

$112.05 -7.98 (-6.65%) At close · Jul 29

Market Cap

$3.60B

30.73M

Named-executive compensation from the company's DEF 14A proxy statements — salary, bonus, stock and option awards, non-equity incentive, and the company-reported total per executive per fiscal year, exactly as disclosed in the Summary Compensation Table.

Fiscal 2020

Executive	Role	Salary	Bonus	Stock Awards	Option Awards	Incentive	Other	Total
Mary G. Puma	CEO	$638,654	—	$2,049,909	—	$1,128,501	$8,550	$3,825,614
Kevin Brewer	CFO	$407,077	—	$782,181	—	$539,479	$8,550	$1,737,287
William Bintz	Executive Vice President,	$342,692	—	$593,410	—	$363,322	$9,050	$1,308,474
Russell Low	President and Chief Executive Officer	$342,692	—	$593,410	—	$363,322	$8,550	$1,307,974
Lynnette C. Fallon	Executive Vice President, HR/Legal and GeneralCounsel	$338,538	—	$512,454	—	$358,918	$8,550	$1,218,460

Fiscal 2019

Executive	Role	Salary	Bonus	Stock Awards	Option Awards	Incentive	Other	Total
Mary G. Puma	CEO	$590,250	—	$1,562,091	—	—	$8,400	$2,160,741
Kevin Brewer	CFO	$378,431	—	$596,065	—	—	$8,825	$983,321
John E. Aldeborgh	Executive Vice President,	$347,538	—	$476,839	—	—	$7,154	$831,531
William Bintz	Executive Vice President,	$318,577	—	$452,177	—	—	$8,400	$779,154
Russell Low	President and Chief Executive Officer	$318,577	—	$452,177	—	—	$8,400	$779,154
Lynnette C. Fallon	Executive Vice President, HR/Legal and GeneralCounsel	$314,715	—	$390,506	—	—	$8,400	$713,621

Fiscal 2018

Executive	Role	Salary	Bonus	Stock Awards	Option Awards	Incentive	Other	Total
Mary G. Puma	CEO	$585,000	—	$1,457,075	—	$556,335	$8,250	$2,606,660
Kevin Brewer	CFO	$387,423	—	$704,256	—	$232,535	$8,250	$1,332,464
John E. Aldeborgh	Executive Vice President,	$355,385	—	$364,269	—	$202,782	$142	$922,577
Product Development	—	$330,000	—	$364,269	—	$188,298	$8,250	$890,816
William Bintz	Executive Vice President,	$330,000	—	$364,269	—	$188,298	$8,250	$890,816
Russell Low	President and Chief Executive Officer	$325,384	—	$364,269	—	$185,664	$8,250	$883,568
Lynnette C. Fallon	Executive Vice President, HR/Legal and GeneralCounsel	$322,077	—	$339,987	—	$183,777	$8,250	$854,091

Fiscal 2017

Executive	Role	Salary	Bonus	Stock Awards	Option Awards	Incentive	Other	Total
Mary G. Puma	CEO	$579,615	—	$951,042	—	$1,064,753	$8,100	$2,603,511
Kevin Brewer	CFO	$379,616	—	$345,833	—	$418,412	$8,100	$1,151,961
Product Development	—	$330,000	—	$276,667	—	$363,726	$8,100	$978,493
Global Customer	Operations	$330,000	—	$276,667	—	$363,726	—	$970,393
Russell Low	President and Chief Executive Officer	$300,000	—	$276,667	—	$330,660	$8,100	$915,427

Executive changes

Person	Role	Change	Effective	Filed
David Ryzhik	Interim Chief Financial Officer	Appointed	2026-03-12	2026-03-12
James Coogan	Chief Financial Officer	Resigned	2026-04-24	2026-03-12

Key facts CIK 1113232 CUSIP 054540208 13F (30d) 109 filings 108 filers Visit website Investor relations