ACLS · Axcelis Technologies Inc

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on July 15, 2026 of service vesting restricted stock units granted to the executive in July 2024. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on July 15, 2026, 7,688 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on July 15, 2026 of service vesting restricted stock units granted to the executive in July 2024. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

This amount includes 56 shares of common stock acquired by the reporting person on June 30, 2026 pursuant to the company's 2020 Employee Stock Purchase Plan, rounded to the nearest whole share. Of the shares held after this vesting event on July 15, 2026, 8,007 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on June 16, 2026 of service vesting restricted stock units granted to the executive in June 2025. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on June 16, 2026, 8,439 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on June 15, 2026 of service vesting restricted stock units granted to the executive in June 2023. The shares issued to the executive following the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on June 15, 2026, 19,447 shares are issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $157.4100 to $157.7100, inclusive. The reporting person undertakes to provide to the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

Of the shares held after this sale on June 3, 2026, 2,110 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Of the shares held after this sale on June 2, 2026, 12,578 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Of the shares held after this sale on May 27, 2026, 4,582 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Of the shares held after this sale on May 22, 2026, 1,440 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Of the shares held after this sale on May 22, 2026, 29,823 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Of the shares held after this sale on May 21, 2026, 20,493 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Of the shares held after this sale on May 20, 2026, 20,871 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $142.4400 to $142.6400, inclusive. The reporting person undertakes to provide to the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

Of the shares held after this sale on May 19, 2026, 2,110 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $138.7600 to $139.1300, inclusive. The reporting person undertakes to provide to the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

Of the shares held after this sale on May 19, 2026, 1,440 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $141.3301 to $141.6000, inclusive. The reporting person undertakes to provide to the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

Of the shares held after this sale on May 19, 2026, 2,110 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Of the shares held after this sale on May 19, 2026, 1,440 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2026 of service vesting restricted stock units granted to the executive in May 2022. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 16, 2026, 106,691 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2026 of service vesting restricted stock units granted to the executive in May 2022. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 16, 2026, 20,756 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2026 of service vesting restricted stock units granted to the executive in May 2022. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 16, 2026, 12,846 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2026 of service vesting restricted stock units granted to the reporting person in May 2022. The shares issued to the reporting person on the vesting were reduced by a number of shares having a value equal to the reporting person's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 16, 2026, 4,582 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2026 of service vesting restricted stock units granted to the executive in May 2022. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 16, 2026, 12,578 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2026 of service vesting restricted stock units granted to the executive in May 2022. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 16, 2026, 20,488 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2023. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 15, 2026, 13,221 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2027.

Of the shares held as of May 15, 2026, 1,440 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. In this grant, the executive may earn shares of common stock, ranging from zero to 200% of the granted units. The shares are earned based on the achievement of performance goals based on relative total shareholder return over a performance period of January 1, 2026 to December 31, 2028. Assuming continuation of employment, 100% of the earned shares will vest on measurement of performance in 2029. Unearned restricted stock units will forfeit at such time.

Of the shares held after this grant on May 15, 2026, 122,412 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the reporting person in May 2025. The shares issued to the reporting person on the vesting were reduced by a number of shares having a value equal to the reporting person's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 15, 2026, 5,937 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2025. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 15, 2026, 21,206 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2025. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 15, 2026, 29,823 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2025. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 15, 2026, 114,727 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the reporting person in May 2024. The shares issued to the reporting person on the vesting were reduced by a number of shares having a value equal to the reporting person's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 15, 2026, 5,557 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2025. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 15, 2026, 21,934 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2023. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 15, 2026, 13,346 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2027.

Of the shares held as of May 15, 2026, 2,110 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2025. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 15, 2026, 8,695 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming continuation of employment, these restricted stock units will vest as to one-third of the shares granted on each of May 15, 2027, May 15, 2028, and May 15, 2029.

Of the shares held following this grant on May 15, 2026, 102,946 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2024. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 15, 2026, 13,696 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. In this grant, the executive may earn shares of common stock, ranging from zero to 200% of the granted units. The shares are earned based on the achievement of performance goals based on relative total shareholder return over a performance period of January 1, 2026 to December 31, 2028. Assuming continuation of employment, 100% of the earned shares will vest on measurement of performance in 2029. Unearned restricted stock units will forfeit at such time.

Of the shares held after this grant on May 15, 2026, 23,471 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2025. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 15, 2026, 22,445 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2024. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 15, 2026, 111,166 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming continuation of employment, these restricted stock units will vest as to one-third of the shares granted on each of May 15, 2027, May 15, 2028, and May 15, 2029.

Of the shares held following this grant on May 15, 2026, 19,967 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2023. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 15, 2026, 20,871 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2027.

Of the shares held as of May 15, 2026, 1,440 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. In this grant, the executive may earn shares of common stock, ranging from zero to 200% of the granted units. The shares are earned based on the achievement of performance goals based on relative total shareholder return over a performance period of January 1, 2026 to December 31, 2028. Assuming continuation of employment, 100% of the earned shares will vest on measurement of performance in 2029. Unearned restricted stock units will forfeit at such time.

Of the shares held after this grant on May 15, 2026, 14,821 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2024. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 15, 2026, 21,221 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2027.

Of the shares held as of May 15, 2026, 1,440 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Represents the closing price of the common stock on the date of the tax withholding.

This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2023. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Of the shares held after this vesting event on May 15, 2026, 108,161 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2027.

Of the shares held as of May 15, 2026, 2,110 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2027.

Of the shares held as of May 15, 2026, 1,440 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. In this grant, the executive may earn shares of common stock, ranging from zero to 200% of the granted units. The shares are earned based on the achievement of performance goals based on relative total shareholder return over a performance period of January 1, 2026 to December 31, 2028. Assuming continuation of employment, 100% of the earned shares will vest on measurement of performance in 2029. Unearned restricted stock units will forfeit at such time.

Of the shares held after this grant on May 15, 2026, 22,743 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. In this grant, the executive may earn shares of common stock, ranging from zero to 200% of the granted units. The shares are earned based on the achievement of performance goals based on relative total shareholder return over a performance period of January 1, 2026 to December 31, 2028. Assuming continuation of employment, 100% of the earned shares will vest on measurement of performance in 2029. Unearned restricted stock units will forfeit at such time.

Of the shares held after this grant on May 15, 2026, 31,616 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming continuation of employment, these restricted stock units will vest as to one-third of the shares granted on each of May 15, 2027, May 15, 2028, and May 15, 2029.

Of the shares held following this grant on May 15, 2026, 9,464 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.