Board Member
Axcelis Technologies Inc (ACLS)Equibles does not estimate personal net worth.
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Get ACLS alertsRussell J. Low is recorded as Board Member at Axcelis Technologies Inc (ACLS) since May 9, 2024 and CEO at Axcelis Technologies Inc (ACLS) since May 11, 2023. Axcelis Technologies Inc reported in an 8-K filed May 12, 2023 that Russell J. Low was appointed Chief Executive Officer and President, effective May 11, 2023. The proxy statement of Axcelis Technologies Inc reports total compensation of $1,307,974 for Russell J. Low in fiscal 2020, including a base salary of $342,692. Disclosed compensation is on record for 4 fiscal years. Russell J. Low has spoken on 1 earnings call across 1 company, most recently for Axcelis Technologies Inc on November 4, 2025. Axcelis Technologies Inc is classified in the Semiconductor Equipment & Materials industry within the Technology sector. Other leadership on record at Axcelis Technologies Inc includes Mary G. Puma (CEO, Chairman and Board Member), Jorge Titinger (Chairman and Board Member), Richard J. Faubert (Chairman and Board Member) and 7 others.
“On May 11, 2023, following the 2023 Annual Meeting of Stockholders (the "Annual Meeting"), the Board of Directors of Axcelis Technologies, Inc. (the "Company") appointed Russell J. Low, Ph.D., age 52, as the Company's Chief Executive Officer and President.”
“Beginning on slide four, we generated solid results in the third quarter with revenue of $214 million and non-GAAP earnings per diluted share of $1.21, both exceeding our outlook.”
2024-05-09–present
2023-05-11–present
Semiconductor Equipment & Materials · Technology
Board Member, CEO
2023-05-11–present
Compensation components disclosed in company proxy statements. Amounts are nominal USD; total is the company-reported figure.
| Fiscal year | Company | Role | Salary | Total |
|---|---|---|---|---|
| 2020 | Axcelis Technologies Inc (ACLS) | Executive Vice President, Engineering (title during 2020) | $342,692 | $1,307,974 |
| 2019 | Axcelis Technologies Inc (ACLS) | Executive Vice President, Engineering (title during 2020) | $318,577 | $779,154 |
| 2018 | Axcelis Technologies Inc (ACLS) | Executive Vice President, Engineering (title during 2020) | $325,384 | $883,568 |
| 2017 | Axcelis Technologies Inc (ACLS) | Executive Vice President, Engineering | $300,000 | $915,427 |
