Current role
Semiconductor Equipment & Materials · Technology
CEO, Chairman, Board Member
2020-05-21–present
Mary G. Puma
Chairman
Axcelis Technologies Inc (ACLS)Board Member
Axcelis Technologies Inc (ACLS)Equibles does not estimate personal net worth.
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Get ACLS alertsAbout Mary G. Puma
Mary G. Puma is recorded as Chairman at Axcelis Technologies Inc (ACLS) since May 11, 2023, Board Member at Axcelis Technologies Inc (ACLS) since May 21, 2020 and CEO at Axcelis Technologies Inc (ACLS). Axcelis Technologies Inc reported in an 8-K filed May 9, 2024 that Mary G. Puma resigned as Executive Chairperson, effective May 9, 2024. Axcelis Technologies Inc reported in an 8-K filed May 12, 2023 that Mary G. Puma was appointed Executive Chairperson of the Board of Directors, effective May 11, 2023. The proxy statement of Axcelis Technologies Inc reports total compensation of $3,825,614 for Mary G. Puma in fiscal 2020, including a base salary of $638,654. Disclosed compensation is on record for 4 fiscal years. Axcelis Technologies Inc is classified in the Semiconductor Equipment & Materials industry within the Technology sector. Other leadership on record at Axcelis Technologies Inc includes Russell J. Low (CEO and Board Member), Jorge Titinger (Chairman and Board Member), Richard J. Faubert (Chairman and Board Member) and 7 others.
“Effective at the Annual Meeting, Mary G. Puma, who served as Executive Chairperson of the Company's Board of Directors since May 11, 2023, resigned from that executive officer role concurrently with the end of her term on the Board of Directors.”
“Coincident with the commencement of Dr. Low's promotion to Chief Executive Officer and President, Mary G. Puma, our former Chief Executive Officer and President, assumed the position of Executive Chairperson of the Board of Directors of the Company, a position she is expected to hold until the 2024 Annual Meeting of Stockholders.”
Affiliation history
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Current
2023-05-11–present
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Current
2020-05-21–present
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Current
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2023-05-11–2024-05-09
Company network
Leadership on record at Axcelis Technologies Inc
- Russell J. Low CEO, Board Member
- Jorge Titinger Chairman, Board Member
- Richard J. Faubert Chairman, Board Member
- James Coogan CFO
- Jeroen Delsman CFO
- Arthur L. George, Jr. Board Member
- Dipti Vachani Board Member
- Gregory B. Graves Board Member
- Jeanne Quirk Board Member
- John T. Kurtzweil Board Member
Executive compensation
Compensation components disclosed in company proxy statements. Amounts are nominal USD; total is the company-reported figure.
| Fiscal year | Company | Role | Salary | Total |
|---|---|---|---|---|
| 2020 | Axcelis Technologies Inc (ACLS) | Chief Executive Officer and President | $638,654 | $3,825,614 |
| 2019 | Axcelis Technologies Inc (ACLS) | Chief Executive Officer and President | $590,250 | $2,160,741 |
| 2018 | Axcelis Technologies Inc (ACLS) | Chief Executive Officer and President | $585,000 | $2,606,660 |
| 2017 | Axcelis Technologies Inc (ACLS) | Chief Executive Officer and President | $579,615 | $2,603,511 |