ASYS · Amtech Systems Inc · Shareholders & Ownership
Every disclosed holder of ASYS in one list: 13F institutions, Schedule 13D and 13G filers, insiders (Forms 3, 4 and 5) and registered funds, each from its own latest filing. Holders nest by CIK and SEC reporting links, never by name, and each is summed once.
Who Owns ASYS
13F quarter Sep 30, 2026, combined view: filers that have not filed yet carry their Jun 30, 2026 positionsNo chart: the summed disclosures exceed shares outstanding, so they are not parts of one whole.
| Holder group | Shares | % Out |
|---|---|---|
| Institutional (13F) | 11,681,845 | 66.72% |
| Insiders (Forms 3, 4, 5) | 3,434,935 | 19.62% |
| 13D/G-only blocks | 3,812,152 | 21.77% |
| Remaining | 1,420,831 | -8.12% |
| Registered funds (N-PORT, not summed) | 2,753,577 | 15.73% |
Shares outstanding: 17,508,101, the issuer's latest cover-page count restated onto today's split basis.
Remaining is negative: the summed disclosures exceed shares outstanding, as when filings are dated at different times or holders that do not disclose their links count the same shares. It is flagged, not clipped.
13D/G-only counts each filer's latest 13D or 13G that no 13F report of the listing contains, that names no 13F filer and that no counted insider files. Funds are never summed: their shares sit inside their advisers' 13F reports.
Holders of ASYS
| # | Holder | Shares | As of | Notes |
|---|---|---|---|---|
| 1 |
|
2,986,341 | ||
| 2 |
Wax Asset Management, LLC
13G
CIK 1598207 · Registered investment adviser · Dec 31, 2025
Rule 13d-1(b), qualified institution
|
1,319,773 | ||
| 3 |
AIGH Capital Management LLC
13F
CIK 1835943 · Unknown · Jun 30, 2026
carried, not yet filed for the newest quarter
|
1,252,000 | ||
| 4 |
Orin Hirschman
13G
CIK 1131362 · Investment adviser · Jun 30, 2026
Rule 13d-1(b), qualified institution
|
1,252,000 | ||
| 5 |
WASATCH ADVISORS LP
13F
CIK 814133 · Registered investment adviser · Sep 30, 2026
|
1,184,904 | ||
| 5.1 |
WASATCH ADVISORS LP
13G
CIK 814133 · Registered investment adviser · Sep 30, 2026
Rule 13d-1(b), qualified institution, not summed
|
1,184,904 | ||
| 6 |
First Eagle Investment Management, LLC
13F
CIK 1325447 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
848,426 | ||
| 6.1 |
First Eagle Investment Management, LLC
13G
CIK 1325447 · Registered investment adviser · Jun 30, 2026
Rule 13d-1(b), qualified institution, not summed
|
848,697 | ||
| 6.2 |
First Eagle Small Cap Opportunity Fund
Fund
S000072438 · Registered fund · Jul 31, 2026
First Eagle Funds, not summed
|
734,102 | ||
| 7 |
BlackRock, Inc.
13F
CIK 2012383 · Holding company · Jun 30, 2026
carried, not yet filed for the newest quarter
|
763,487 | ||
| 7.1 |
iShares Russell 2000 ETF
Fund
S000004344 · Registered fund · Jun 30, 2026
iShares Trust, not summed
|
300,844 | ||
| 7.2 |
iShares Russell 2000 Growth ETF
Fund
S000004343 · Registered fund · Jun 30, 2026
iShares Trust, not summed
|
109,995 | ||
| 7.3 |
iShares Micro-Cap ETF
Fund
S000004439 · Registered fund · Jun 30, 2026
iShares Trust, not summed
|
39,242 | ||
| 7.4 |
Master Small Cap Index Series
Fund
S000002716 · Registered fund · Jun 30, 2026
Quantitative Master Series LLC, not summed
|
21,895 | ||
| 7.5 |
iShares Russell Small/Mid-Cap Index Fund
Fund
S000050373 · Registered fund · Jul 31, 2026
BlackRock Funds, not summed
|
2,109 | ||
| 8 |
AWM Investment Company, Inc.
13F
CIK 1535264 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
690,000 | ||
| 9 |
Pacific Ridge Capital Partners, LLC
13G
CIK 1591546 · Registered investment adviser · Dec 31, 2024
Rule 13d-1(b), qualified institution
|
652,393 | ||
| 10 |
Piton Capital Partners LLC
13D
CIK 1644342 · Unknown · Jun 1, 2026
Item 4 purpose: not restated by this amendment, the earlier 13D's purpose stands
not summed
|
600,000 | ||
| 11 |
ROYCE & ASSOCIATES LP
13G
CIK 906304 · Registered investment adviser · Mar 31, 2025
Rule 13d-1(d), exempt investor
|
587,986 | ||
| 12 |
VANGUARD CAPITAL MANAGEMENT LLC
13F
CIK 2100119 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
580,502 | ||
| 13 |
ACADIAN ASSET MANAGEMENT LLC
13F
CIK 916542 · Unknown · Jun 30, 2026
carried, not yet filed for the newest quarter
|
580,278 | ||
| 14 |
VANGUARD TOTAL STOCK MARKET INDEX FUND
Fund
S000002848 · Registered fund · Jun 30, 2026
VANGUARD INDEX FUNDS, not summed
|
443,626 | ||
| 15 |
DIMENSIONAL FUND ADVISORS LP
13F
CIK 354204 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
426,694 | ||
| 15.1 |
U.S. Targeted Value Portfolio
Fund
S000000970 · Registered fund · Jul 31, 2026
DFA INVESTMENT DIMENSIONS GROUP INC, not summed
|
99,906 | ||
| 15.2 |
U.S. SMALL CAP PORTFOLIO
Fund
S000000971 · Registered fund · Jul 31, 2026
DFA INVESTMENT DIMENSIONS GROUP INC, not summed
|
78,288 | ||
| 15.3 |
Dimensional U.S. Small Cap ETF
Fund
S000070906 · Registered fund · Jul 31, 2026
Dimensional ETF Trust, not summed
|
46,598 | ||
| 15.4 |
U.S. MICRO CAP PORTFOLIO
Fund
S000000948 · Registered fund · Jul 31, 2026
DFA INVESTMENT DIMENSIONS GROUP INC, not summed
|
46,592 | ||
| 15.5 |
Dimensional U.S. Core Equity 2 ETF
Fund
S000070903 · Registered fund · Jul 31, 2026
Dimensional ETF Trust, not summed
|
31,325 | ||
| 16 |
MARSHALL WACE, LLP
13F
CIK 1318757 · Exempt reporting adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
398,564 | ||
| 17 |
|
313,425 | ||
| 18 |
ARROWSTREET CAPITAL, LIMITED PARTNERSHIP
13F
CIK 1164508 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
308,896 | ||
| 19 |
GEODE CAPITAL MANAGEMENT, LLC
13F
CIK 1214717 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
284,836 | ||
| 20 |
Connor, Clark & Lunn Investment Management Ltd.
13F
CIK 1596800 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
282,388 | ||
| 21 |
RENAISSANCE TECHNOLOGIES LLC
13F
CIK 1037389 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
260,605 | ||
| 22 |
TWO SIGMA INVESTMENTS, LP
13F
CIK 1179392 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
254,367 | ||
| 23 |
JANE STREET GROUP, LLC
13F
CIK 1595888 · Unknown · Jun 30, 2026
carried, not yet filed for the newest quarter
|
249,465 | ||
| 24 |
Regal Partners Ltd
13F
CIK 1577774 · Unknown · Jun 30, 2026
carried, not yet filed for the newest quarter
|
237,503 | ||
| 25 |
Qube Research & Technologies Ltd
13F
CIK 1729829 · Exempt reporting adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
194,714 | ||
| 26 |
|
155,849 | ||
| 26.1 |
STATE STREET SMALL/MID CAP EQUITY INDEX PORTFOLIO
Fund
S000050332 · Registered fund · Jun 30, 2026
STATE STREET INSTITUTIONAL INVESTMENT TRUST, not summed
|
300 | ||
| 26.2 |
State Street Total Return V.I.S. Fund
Fund
S000001637 · Registered fund · Jun 30, 2026
STATE STREET VARIABLE INSURANCE SERIES FUNDS INC, not summed
|
296 | ||
| 27 |
VANGUARD EXTENDED MARKET INDEX FUND
Fund
S000002841 · Registered fund · Jun 30, 2026
VANGUARD INDEX FUNDS, not summed
|
124,071 | ||
| 28 |
Trexquant Investment LP
13F
CIK 1633445 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
119,750 | ||
| 29 |
BRIDGEWAY CAPITAL MANAGEMENT, LLC
13F
CIK 1107261 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
111,472 | ||
| 29.1 |
Omni Small-Cap Value Fund
Fund
S000033567 · Registered fund · Jun 30, 2026
Bridgeway Funds, Inc., not summed
|
49,200 | ||
| 29.2 |
Ultra-Small Company Market Fund
Fund
S000004424 · Registered fund · Jun 30, 2026
Bridgeway Funds, Inc., not summed
|
24,600 | ||
| 30 |
CITADEL ADVISORS LLC
13F
CIK 1423053 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
106,246 | ||
| 31 |
Palisades Investment Partners, LLC
13F
CIK 1427373 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
102,691 | ||
| 32 |
NORTHERN TRUST CORP
13F
CIK 73124 · Bank · Jun 30, 2026
carried, not yet filed for the newest quarter
|
91,857 | ||
| 32.1 |
Small Cap Index Fund
Fund
S000001245 · Registered fund · Jun 30, 2026
Northern Funds, not summed
|
5,994 | ||
| 32.2 |
Small Cap Core Fund
Fund
S000001244 · Registered fund · Jun 30, 2026
Northern Funds, not summed
|
597 | ||
| 33 |
MILLENNIUM MANAGEMENT LLC
13F
CIK 1273087 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
90,626 | ||
| 34 |
Y-Intercept (Hong Kong) Ltd
13F
CIK 1772875 · Exempt reporting adviser · Sep 30, 2026
|
88,976 | ||
| 35 |
MORGAN STANLEY
13F
CIK 895421 · Holding company · Jun 30, 2026
carried, not yet filed for the newest quarter
|
82,999 | ||
| 36 |
VANGUARD FIDUCIARY TRUST CO
13F
CIK 933478 · Unknown · Jun 30, 2026
carried, not yet filed for the newest quarter
|
81,805 | ||
| 37 |
VANGUARD PORTFOLIO MANAGEMENT LLC
13F
CIK 2100121 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
81,351 | ||
| 38 |
Point72 Asset Management, L.P.
13F
CIK 1603466 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
79,684 | ||
| 39 |
|
79,085 | ||
| 40 |
Informed Momentum Co LLC
13F
CIK 1510989 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
72,579 | ||
| 41 |
BNP PARIBAS ARBITRAGE, SA
13F
CIK 1166588 · Non-US institution · Jun 30, 2026
carried, not yet filed for the newest quarter
|
71,293 | ||
| 42 |
XTX Topco Ltd
13F
CIK 1828301 · Unknown · Jun 30, 2026
carried, not yet filed for the newest quarter
|
69,832 | ||
| 43 |
LOS ANGELES CAPITAL MANAGEMENT LLC
13F
CIK 1177206 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
63,562 | ||
| 44 |
O'SHAUGHNESSY ASSET MANAGEMENT, LLC
13F
CIK 1423442 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
54,829 | ||
| 45 |
GOLDMAN SACHS GROUP INC
13F
CIK 886982 · Holding company · Jun 30, 2026
carried, not yet filed for the newest quarter
|
54,066 | ||
| 45.1 |
Goldman Sachs ActiveBeta(R) U.S. Small Cap Equity ETF
Fund
S000048296 · Registered fund · Aug 31, 2026
Goldman Sachs ETF Trust, not summed
|
19,972 | ||
| 45.2 |
Goldman Sachs Small Cap Growth Insights Fund
Fund
S000014930 · Registered fund · Jul 31, 2026
Goldman Sachs Trust, not summed
|
13,804 | ||
| 45.3 |
Goldman Sachs Small Cap Equity Insights Fund
Fund
S000009329 · Registered fund · Jul 31, 2026
Goldman Sachs Trust, not summed
|
6,739 | ||
| 45.4 |
Goldman Sachs Absolute Return Tracker Fund
Fund
S000020314 · Registered fund · Aug 31, 2026
GOLDMAN SACHS TRUST, not summed
|
17 | ||
| 46 |
|
53,450 | ||
| 47 |
SEI INVESTMENTS CO
13F
CIK 350894 · Holding company · Jun 30, 2026
carried, not yet filed for the newest quarter
|
49,501 | ||
| 48 |
Man Group plc
13F
CIK 1637460 · Unknown · Jun 30, 2026
carried, not yet filed for the newest quarter
|
45,224 | ||
| 49 |
NEW YORK STATE COMMON RETIREMENT FUND
13F
CIK 810265 · Unknown · Jun 30, 2026
carried, not yet filed for the newest quarter
|
44,009 | ||
| 50 |
Hillsdale Investment Management Inc.
13F
CIK 1368465 · Registered investment adviser · Jun 30, 2026
carried, not yet filed for the newest quarter
|
43,080 |
10 more nested rows are not shown here; Every filing lists them all.
Shares are restated onto today's split basis. Change compares each row with the same holder's previous filing in the same source; a dash means there is none to compare. Nested 13D/G, insider and fund rows are not summed, since a 13F report already holds them.
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