ASYS · Amtech Systems Inc

Each restricted stock unit represents a contingent right to receive one share of Common Stock of Amtech Systems, Inc.

One-third (1/3) of the restricted stock units shall vest on each of the first three anniversaries of the grant date.

Each restricted stock unit represents a contingent right to receive one share of Common Stock of Amtech Systems, Inc.

Fifty percent (50%) of the restricted stock units shall vest on each of the first two anniversaries of the grant date.

Each restricted stock unit represents a contingent right to receive one share of Common Stock of Amtech Systems, Inc.

One-third (1/3) of the restricted stock units shall vest on each of the first three anniversaries of the grant date.

Following the reported exercise, no shares remained subject to the director stock option reported on this line.

Following all of the transactions reported on this Form 4, Mr. Averick no longer holds any director stock options (right to buy) of the Issuer.

Following the reported exercise, no shares remained subject to the director stock option reported on this line.

Following the reported exercise, no shares remained subject to the director stock option reported on this line.

Price omitted because the transaction is a grant of a stock option

One-third of the stock option granted vests on each of the first three anniversaries of the grant date.

Price omitted because the transaction is a grant of a stock option

One-third of the stock option granted vests on each of the first three anniversaries of the grant date.

Restricted stock units converted into shares of Common Stock on a one-for-one basis.

On March 5, 2025, Mr. Averick was granted 8,081 restricted stock units that vested on March 5, 2026. Restricted stock units converted into shares of Common Stock on a one-for-one basis.

Each restricted stock unit represents a contingent right to receive one share of Common Stock of Amtech Systems, Inc.

Each restricted stock unit represents a contingent right to receive one share of Common Stock of Amtech Systems, Inc.

Each restricted stock unit represents a contingent right to receive one share of Common Stock of Amtech Systems, Inc.

Each restricted stock unit represents a contingent right to receive one share of Common Stock of Amtech Systems, Inc.

This is the total of all restricted stock units held by Mr. Averick as of March 4, 2026, including those with different terms and conditions.

Each restricted stock unit represents a contingent right to receive one share of Common Stock of Amtech Systems, Inc.

Each restricted stock unit represents a contingent right to receive one share of Common Stock of Amtech Systems, Inc.

This is the total of all director stock options (right to buy), including those with different terms and conditions, held by Mr. Averick as of the filing date of this Form 4 (and after giving effect to the reported transactions).

Price omitted because the transaction is a grant of a stock option.

This reported prices in Column 4 are weighted average prices rounded to the nearest hundredth. The price of shares purchased on May 14, 2025 ranged from $3.45 to $3.51 per share. The price of shares purchased on May 16, 2025 ranged from $3.48 to $3.55 per share. Mr. Averick undertakes to provide the Issuer, any security holder of the Issuer, or the staff of the SEC, upon request, full information regarding the number of shares purchased within the price range described in this footnote.

This reported prices in Column 4 are weighted average prices rounded to the nearest hundredth. The price of shares purchased on May 14, 2025 ranged from $3.45 to $3.51 per share. The price of shares purchased on May 16, 2025 ranged from $3.48 to $3.55 per share. Mr. Averick undertakes to provide the Issuer, any security holder of the Issuer, or the staff of the SEC, upon request, full information regarding the number of shares purchased within the price range described in this footnote.

Each restricted stock unit represents a contingent right to receive one share of Common Stock of Amtech Systems, Inc.

One-third of the RSU grant vests on each of the first three anniversaries of the grant date.

The reported price in Column 4 is a weighted average price rounded to the nearest hundredth. The price of shares purchased ranged from $4.85 to $4.87 per share. Mr. Averick undertakes to provide the Issuer, any security holder of the Issuer, or the staff of the SEC, upon request, full information regarding the number of shares purchased within the price range described in this footnote.

Each restricted stock unit represents a contingent right to receive one share of Common Stock of Amtech Systems, Inc.

Restricted stock units converted into Common Shares on a one-for-one basis.

On March 6, 2024, Mr. Averick was granted 8,299 restricted stock units that vested on March 6, 2025.

This is the total of all restricted stock units held by Mr. Averick as of the filing date of this Form 4.

Each restricted stock unit represents a contingent right to receive one share of Common Stock of Amtech Systems, Inc.

Restricted stock units converted into Common Shares on a one-for-one basis.

Each restricted stock unit represents a contingent right to receive one share of Common Stock of Amtech Systems, Inc.