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About Russell Low

Russell Low is recorded as CEO at Axcelis Technologies Inc (ACLS). The proxy statement of Axcelis Technologies Inc reports total compensation of $1,307,974 for Russell Low in fiscal 2020, including a base salary of $342,692. Disclosed compensation is on record for 4 fiscal years. Russell Low has spoken on 12 earnings calls across 1 company, most recently for Axcelis Technologies Inc on August 6, 2026. Axcelis Technologies Inc is classified in the Semiconductor Equipment & Materials industry within the Technology sector. Other leadership on record at Axcelis Technologies Inc includes Mary G. Puma (CEO, Chairman and Board Member), Russell J. Low (CEO and Board Member), Jorge Titinger (Chairman and Board Member) and 7 others.

Russell Low on recent calls

“Good morning, everyone, and thank you for joining us in our second quarter 2026 earnings call. In the second quarter, we delivered revenue of $250 million in earnings per diluted share of $1.06, both above our expectations.”
CEO, Q2 2026 Axcelis Technologies, Inc. Earnings Conference Call ·
“Good afternoon, everyone, and thank you for joining us for our first quarter 2026 earnings call. Before I get into our results today, I'd like to briefly address the change in our finance organization leadership, which we announced in March.”
CEO, Axcelis Technologies Inc Q1 FY2026 Earnings Call ·
“Thank you, David, and good afternoon, everyone, and thank you for joining us for the fourth quarter and full-year 2025 earnings call. Beginning on slide four, we generated solid results in the fourth quarter with revenue of $238 million and non-GAAP earnings per deleted share of $1.49, both exceeding our outlook.”
CEO, Axcelis Technologies Inc Q4 FY2025 Earnings Call ·
“Beginning on Slide 4, we delivered solid results in the second quarter with revenue of $195 million and non-GAAP earnings per diluted share of $1.13, both exceeding our outlook.”
CEO, Axcelis Technologies Inc Q2 FY2025 Earnings Call ·
“Beginning on Slide number 4, we executed well during the first quarter with revenue of $193 million and earnings per diluted share of $0.88, both exceeding our outlook with particular strength in our gross margins and disciplined cost control.”
CEO, Axcelis Technologies Inc Q1 FY2025 Earnings Call ·

Affiliation history

Company network

Leadership on record at Axcelis Technologies Inc

Executive compensation

Compensation components disclosed in company proxy statements. Amounts are nominal USD; total is the company-reported figure.

Fiscal year Company Salary Total
2020 Axcelis Technologies Inc (ACLS) $342,692 $1,307,974
2019 Axcelis Technologies Inc (ACLS) $318,577 $779,154
2018 Axcelis Technologies Inc (ACLS) $325,384 $883,568
2017 Axcelis Technologies Inc (ACLS) $300,000 $915,427

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