ENTG · Entegris Inc

Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee.

The option is fully vested.

These shares include 175.44 shares acquired under the Entegris, Inc. Employee Stock Purchase Plan on June 30, 2026.

The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $164.29 to $164.66, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

These Restricted Stock Units vest in full on the earlier of (1) the anniversary date of the grant, or (2) the date of the Company's 2027 Annual Meeting of Stockholders.

These shares were awarded on August 3, 2026 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee.

This option is fully vested.

These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on February 13, 2026.

Each restricted stock unit ("RSU") represents a contingent right to receive one share of common stock. The RSUs vest as follows: 25% of the RSUs vest on May 18, 2027, and the remaining 75% of the RSUs vest in equal quarterly installments over the three year period thereafter.

Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee.

The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $132.71 to $132.96, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee.

The option is fully vested.

The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $133.01 to $133.05, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee.

This option vests in four equal installments. The first three installments became exercisable on February 19, 2024, February 19, 2025, and February 19, 2026, respectively. The final installment will become exercisable on February 19, 2027.

Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee.

This option is fully vested.

Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee.

This option vests in four equal annual installments. The first three installments became exercisable on February 19, 2024, February 19, 2025, and February 19, 2026, respectively. The final installment will become exercisable on February 19, 2027.

The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $140.00 to $140.18, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on February 13, 2026.

Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee.

The option is fully vested.

These Restricted Stock Units vest in full on the earlier of (1) the first anniversary date of the grant, or (2) the date of the Company's 2027 Annual Meeting of Stockholders.

These shares were awarded on May 6, 2026 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

These Restricted Stock Units vest in full on the earlier of (1) the first anniversary date of the grant, or (2) the date of the Company's 2027 Annual Meeting of Stockholders.

These shares were awarded on May 6, 2026 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

These Restricted Stock Units vest in full on the earlier of (1) the first anniversary date of the grant, or (2) the date of the Company's 2027 Annual Meeting of Stockholders.

These shares were awarded on May 6, 2026 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

These Restricted Stock Units vest in full on the earlier of (1) the first anniversary date of the grant, or (2) the date of the Company's 2027 Annual Meeting of Stockholders.

These shares were awarded on May 6, 2026 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

These Restricted Stock Units vest in full on the earlier of (1) the first anniversary date of the grant, or (2) the date of the Company's 2027 Annual Meeting of Stockholders.

These shares were awarded on May 6, 2026 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

These Restricted Stock Units vest in full on the earlier of (1) the first anniversary date of the grant, or (2) the date of the Company's 2027 Annual Meeting of Stockholders.

These shares were awarded on May 6, 2026 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee.

This option is fully vested.

These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on February 10, 2025.

The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $140.00 to $146.46, inclusive. The Reporting Person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on February 10, 2025.

The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $140.00 to $140.74, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee.

This option is fully vested.

These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on February 21, 2025.

These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on August 8, 2025.

Shares automatically withheld upon settlement of restricted stock units to satisfy tax withholding obligations.

Because the shares vested on Sunday, April 5, the price stated above is the closing price per share of Entegris common stock on Thursday, April 2nd, the last trading day immediately prior to the vesting date.

Shares automatically withheld upon settlement of restricted stock units to satisfy tax withholding obligations.

Because the shares vested on Sunday, April 5, the price stated above is the closing price per share of Entegris common stock on Thursday, April 2nd, the last trading day immediately prior to the vesting date.

Shares automatically withheld upon settlement of restricted stock units to satisfy tax withholding obligations.

Because the shares vested on Sunday, April 5, the price stated above is the closing price per share of Entegris common stock on Thursday, April 2nd, the last trading day immediately prior to the vesting date.

Shares automatically withheld upon settlement of restricted stock units to satisfy tax withholding obligations.

Because the shares vested on Sunday, April 5, the price stated above is the closing price per share of Entegris common stock on Thursday, April 2nd, the last trading day immediately prior to the vesting date.

Shares automatically withheld upon settlement of restricted stock units to satisfy tax withholding obligations.

Because the shares vested on Sunday, April 5, the price stated above is the closing price per share of Entegris common stock on Thursday, April 2nd, the last trading day immediately prior to the vesting date.

Shares automatically withheld upon settlement of restricted stock units to satisfy tax withholding obligations.

Because the shares vested on Sunday, April 5, the price stated above is the closing price per share of Entegris common stock on Thursday, April 2nd, the last trading day immediately prior to the vesting date.

Shares automatically withheld upon settlement of restricted stock units to satisfy tax withholding obligations.

Because the shares vested on Sunday, April 5, the price stated above is the closing price per share of Entegris common stock on Thursday, April 2nd, the last trading day immediately prior to the vesting date.

Each restricted stock unit ("RSU") represents a contingent right to receive one share of common stock. The RSUs vest as follows: 25% of the RSUs vest on April 5, 2027, and the remaining 75% of the RSUs vest in equal quarterly installments over the three year period thereafter.

Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee.